Characterization of hexamethyldisiloxane plasma polymerization in a DC glow discharge in an argon flow

Zuza, D.A.; Нехорошев, В. О.; Batrakov, A. V.; Markov, A.B.; Курзина, И. А.

doi:10.1016/j.vacuum.2022.111690

Cited by 9 publications

(5 citation statements)

References 42 publications

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“…Under the influence of the resulting electric field, positive ions in the plasma are accelerated towards the negatively biased electrode (the cathode) with the ability to sputter its surface. Depending on the process conditions and the choice of process gas, DC glow plasma can etch polymer surfaces (e.g., polysulfone membranes) [59] or deposit polymer coatings onto substrates (e.g., hexamethyldisiloxane plasma polymerization) [60] . Two types of DC glow plasmas can be utilized to process polymers: DC continuous discharges and DC pulsed discharges.…”

Section: Glow Plasma Devicesmentioning

confidence: 99%

“…As an example of DC continuous plasma, Figure 4a shows a coaxial reactor composed of a glass tube surrounded by two ring electrodes, one powered to a DC voltage of 700 V, the other grounded [60]. The vector gas and the monomer vapor are injected in the interelectrode region (<1 cm 3 ), which provides a stable flow of the plasma-monomer mixture.…”

Section: Glow Plasma Devicesmentioning

confidence: 99%

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From Basics to Frontiers: A Comprehensive Review of Plasma-Modified and Plasma-Synthesized Polymer Films

Dufour

2023

Polymers

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This comprehensive review begins by tracing the historical development and progress of cold plasma technology as an innovative approach to polymer engineering. The study emphasizes the versatility of cold plasma derived from a variety of sources including low-pressure glow discharges (e.g., radiofrequency capacitively coupled plasmas) and atmospheric pressure plasmas (e.g., dielectric barrier devices, piezoelectric plasmas). It critically examines key operational parameters such as reduced electric field, pressure, discharge type, gas type and flow rate, substrate temperature, gap, and how these variables affect the properties of the synthesized or modified polymers. This review also discusses the application of cold plasma in polymer surface modification, underscoring how changes in surface properties (e.g., wettability, adhesion, biocompatibility) can be achieved by controlling various surface processes (etching, roughening, crosslinking, functionalization, crystallinity). A detailed examination of Plasma-Enhanced Chemical Vapor Deposition (PECVD) reveals its efficacy in producing thin polymeric films from an array of precursors. Yasuda’s models, Rapid Step-Growth Polymerization (RSGP) and Competitive Ablation Polymerization (CAP), are explained as fundamental mechanisms underpinning plasma-assisted deposition and polymerization processes. Then, the wide array of applications of cold plasma technology is explored, from the biomedical field, where it is used in creating smart drug delivery systems and biodegradable polymer implants, to its role in enhancing the performance of membrane-based filtration systems crucial for water purification, gas separation, and energy production. It investigates the potential for improving the properties of bioplastics and the exciting prospects for developing self-healing materials using this technology.

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Section: Glow Plasma Devicesmentioning

confidence: 99%

Section: Glow Plasma Devicesmentioning

confidence: 99%

From Basics to Frontiers: A Comprehensive Review of Plasma-Modified and Plasma-Synthesized Polymer Films

Dufour

2023

Polymers

View full text Add to dashboard Cite

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“…Hence, a T-dependence of the pre-exponential factor might be considered yielding a modified Arrhenius equation as in Equation ( 2), with E pl still replacing k B T in the exponential term. Assuming that the increase in T gas (or in the size of the high-temperature region) is roughly proportional to E pl , the factor (E pl /E th ) m can be introduced in the pre-exponential factor of the conversion equation (Equation (55) or Eq. ( 47)), yielding for…”

Section: Plasma Gas Conversionmentioning

confidence: 99%

“…HMDSO might be used as a model molecule to apply the Arrhenius-like approach using different plasma operational conditions. [6,[53][54][55] Optimum conversion of HMDSO into film-forming species can be achieved, for example, in an asymmetric CCP RF plasma at sufficiently high T e and/or Ar admixture (Figure 5). Beside electron impact activation, Ar metastables (≥11.5 eV) also contribute to the transfer of energy to the molecules, that is, to the polymerizable gases.…”

Section: Plasma Polymerizationmentioning

confidence: 99%

Plasma activation mechanisms governed by specific energy input: Potential and perspectives

Hegemann

2023

Plasma Processes & Polymers

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In a low‐temperature plasma, the electrons pick up energy from the electric field in collisions with atoms and molecules, gaining high kinetic energy that must be sufficient for ionizing reactions to sustain the plasma. For molecular gases, an average energy per heavy gas particle is thus available in the plasma, the specific energy input, yielding plasma activation by inelastic collisions. Following a distribution law, the probability for the activation mechanism can be described by an Arrhenius‐like equation. The potential of this approach is demonstrated on the basis of plasma polymerization and plasma CO2 conversion. For perspective, energy efficiencies are discussed as a function of conversion indicating the optimum that can be achieved by electron impact activation compared with additional ways of energy transfer, probably depending on certain constraints.

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“…Glow discharge has been used in many different branches of science, such as in plasma polymerization [ 61 ] and carbon dioxide splitting [ 59 ]. The literature review has revealed that it is possible to obtain hydrogen by glow discharge plasma [ 62 ].…”

Section: Types Of Plasma Reactorsmentioning

confidence: 99%

Green Hydrogen Production through Ammonia Decomposition Using Non-Thermal Plasma

Moszczyńska,

Liu,

Wiśniewski

2023

IJMS

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Liquid hydrogen carriers will soon play a significant role in transporting energy. The key factors that are considered when assessing the applicability of ammonia cracking in large-scale projects are as follows: high energy density, easy storage and distribution, the simplicity of the overall process, and a low or zero-carbon footprint. Thermal systems used for recovering H2 from ammonia require a reaction unit and catalyst that operates at a high temperature (550–800 °C) for the complete conversion of ammonia, which has a negative effect on the economics of the process. A non-thermal plasma (NTP) solution is the answer to this problem. Ammonia becomes a reliable hydrogen carrier and, in combination with NTP, offers the high conversion of the dehydrogenation process at a relatively low temperature so that zero-carbon pure hydrogen can be transported over long distances. This paper provides a critical overview of ammonia decomposition systems that focus on non-thermal methods, especially under plasma conditions. The review shows that the process has various positive aspects and is an innovative process that has only been reported to a limited extent.

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Characterization of hexamethyldisiloxane plasma polymerization in a DC glow discharge in an argon flow

Cited by 9 publications

References 42 publications

From Basics to Frontiers: A Comprehensive Review of Plasma-Modified and Plasma-Synthesized Polymer Films

From Basics to Frontiers: A Comprehensive Review of Plasma-Modified and Plasma-Synthesized Polymer Films

Plasma activation mechanisms governed by specific energy input: Potential and perspectives

Green Hydrogen Production through Ammonia Decomposition Using Non-Thermal Plasma

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