2022
DOI: 10.1016/j.vacuum.2021.110724
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Characterization of deuteriated titanium thin film by residual gas analyzer

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Cited by 2 publications
(4 citation statements)
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“…At a deuterium filled pressure of 10 −4 mbar, the 35 CF ball valve was closed and the substrate chamber was segregated from the turbo molecular pump followed by filling with deuterium at a pressure of 3 bar and left for 120 h for absorption. Effect of higher pressure and higher duration on quantity of deuterium in titanium thin film was studied earlier [5] and was observed that charging with higher pressure and higher duration leads to higher quantity of deuterium in the titanium thin film.…”
Section: Methodsmentioning
confidence: 96%
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“…At a deuterium filled pressure of 10 −4 mbar, the 35 CF ball valve was closed and the substrate chamber was segregated from the turbo molecular pump followed by filling with deuterium at a pressure of 3 bar and left for 120 h for absorption. Effect of higher pressure and higher duration on quantity of deuterium in titanium thin film was studied earlier [5] and was observed that charging with higher pressure and higher duration leads to higher quantity of deuterium in the titanium thin film.…”
Section: Methodsmentioning
confidence: 96%
“…Chemical attack was performed at room temperature for 20 min with a quick stirring of the solution [10]. The etched copper substrate was coated with titanium by thermal evaporation method in a vacuum system described in earlier work [5]. Titanium wire of 0.5 mm diameter was heated to its vaporization temperature in a tungsten spiral coil in a vacuum system pumped by turbo molecular pump.…”
Section: Methodsmentioning
confidence: 99%
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