Characterization of CVD TiN coating at different deposition temperatures and its application in hydrocarbon pyrolysis

Oxidation behavior of CVD star-shaped TiN coating in ambient air

“…Before the CVD experiment, the 310S foils were washed in soap solution, rinsed with acetone and ethanol, and then dried in a vacuum drying oven at 120 1C for 1 h. After deposition, the substrates were kept at high purity nitrogen atmosphere and cooled down to room temperature. More details were described elsewhere [7,19].…”

“…Owing to these properties, TiN is used in a wide range of applications, such as protective materials for machine parts and cutting tools, wear-resistant coatings for orthopedic implants and diffusion barriers in semiconductor technology [4][5][6]. Recently, TiN coatings have been designed as anti-coking coatings for hydrocarbon steam cracking [7] and liquid hydrocarbon fuels pyrolysis [8], and exhibit a very good protective layer to prevent the substrate from metal dusting and severe coking. In our recent work [7], star-shaped TiN coatings were prepared by chemical vapor deposition (CVD) and their anti-coking ratios above 90% was obtained during cyclohexane pyrolysis at 770 1C for 1.5 h. For anti-coking applications, CVD TiN coating is an ideal material due to the following reasons: (i) CVD TiN coating has a good adhesive strength due to higher linear expansion coefficient.…”

“…Recently, TiN coatings have been designed as anti-coking coatings for hydrocarbon steam cracking [7] and liquid hydrocarbon fuels pyrolysis [8], and exhibit a very good protective layer to prevent the substrate from metal dusting and severe coking. In our recent work [7], star-shaped TiN coatings were prepared by chemical vapor deposition (CVD) and their anti-coking ratios above 90% was obtained during cyclohexane pyrolysis at 770 1C for 1.5 h. For anti-coking applications, CVD TiN coating is an ideal material due to the following reasons: (i) CVD TiN coating has a good adhesive strength due to higher linear expansion coefficient. (ii) CVD TiN coating is well crystallized instead of amorphous, which lacks surface acid sites to form the catalytic coking.…”

Comparison of the anti-coking performance of CVD TiN, TiO 2 and TiC coatings for hydrocarbon fuel pyrolysis

“…Because the characterization of TiN and TiO 2 coatings has been described in detail in our previous work [19][20][21], only the characterization of TiC coating is shown here. Fig.…”

“…In previous work [19][20][21], the anti-coking performances of TiN and TiO 2 coatings were investigated. The results show that TiN coating has an excellent anti-coking performance but poor oxidation resistance [22].…”