Characterization of boron nitride films deposited from BCl3-NH3-H2 mixtures in chemical vapour infiltration conditions

Cholet, V.; Vandenbulcke, L.; Rouan, J. P.; Baillif, Patrick; Erre, R.

doi:10.1007/bf00368905

Cited by 99 publications

(49 citation statements)

References 18 publications

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“…As seen in 191.1 eV for B 1s and 397.6-398.7 eV for N 1s for boron nitride [35,36]. The B 1s and N 1s spectra of porous BN also exhibited shake-up satellite peaks, which confirm the presence of sp 2 -hybridised BN in the hexagonal phase, as previously reported [37][38][39].…”

Section: Resultssupporting

confidence: 67%

Tunable porous boron nitride: Investigating its formation and its application for gas adsorption

Marchesini

Regoutz

Payne

et al. 2017

Microporous and Mesoporous Materials

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Boron nitride (BN) has applications in a number of areas: it can be used as lubricant, as insulating thermoconductive filler or UV-light emitter. BN can also capture large amounts of hydrocarbons and gaseous molecules, provided that it exhibits a porous structure. This porous structure also enables its application as a drug-delivery nanocarrier. Little if anything is known on controlling the porosity of BN, even though it has tremendous implications in terms of adsorption performance and drug delivery properties. To address * Corresponding Author: Camille Petit, camille.petit@imperial.ac.uk M A N U S C R I P T A C C E P T E D ACCEPTED MANUSCRIPT 2 this aspect, we provide for the first time an in-depth investigation of the effects of the synthesis conditions on the formation of porous BN. The material was also tested for CO 2 capture. We found that the intermediate preparation is of paramount importance and can in fact be used to tune the porosity of BN. Owing to a combination of spectroscopic and thermal analyses, we attributed this phenomenon to the variation of the thermal decomposition pattern of the intermediates. The most microporous BN produced was able to capture CO 2 while not retaining N 2 . Overall, this study opens the route for the design of well-controlled porous BN structures to be applied as adsorbents and drug-delivery carriers.

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Section: Resultssupporting

confidence: 67%

Tunable porous boron nitride: Investigating its formation and its application for gas adsorption

Marchesini

Regoutz

Payne

et al. 2017

Microporous and Mesoporous Materials

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show abstract

“…High internal porosity with unsaturated B-N bonds favors the hydrolysis of BN by moisture and could explain the degradation of films through the formation of ammonium borate hydrate crystals, as previously reported for unstable thermal CVD BN films. 19,20 Nevertheless, when the films are deposited on the cathode using the B 2 H 6 -N 2 mixture, the tensile stress and the low surface mobility of adsorbed species might be counteracted by the beneficial effects of ion bombardment, favoring the growth of dense, adherent, and stable films. On the contrary, the damaging effect of ion bombardment through excessive compressive stress is reflected in the deposition of cathodic films from the B 2 H 6 -H 2 -NH 3 mixture.…”

Section: Discussionmentioning

confidence: 99%

“…In addition, despite the work done in characterizing the properties of BN films, relatively few reports deal with their stability when aging and exposed to atmosphere. Several stability studies have been reported for BN films obtained by thermal CVD, [19][20][21] but there is a lack of similar studies for PECVD BN films. Stability is crucial in determining the suitability of a thin-film material for application as a protective coating.…”

Section: Introductionmentioning

confidence: 99%

Plasma-enhanced chemical vapor deposition of boron nitride thin films from B2H6–H2–NH3 and B2H6–N2 gas mixtures

Andújar

Bertrán

Polo

1998

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Highly transparent and stoichiometric boron nitride ͑BN͒ films were deposited on both electrodes ͑anode and cathode͒ of a radio-frequency parallel-plate plasma reactor by the glow discharge decomposition of two gas mixtures: B 2 H 6 -H 2 -NH 3 and B 2 H 6 -N 2 . The chemical, optical, and structural properties of the films, as well as their stability under long exposition to humid atmosphere, were analyzed by x-ray photoelectron, infrared, and Raman spectroscopies; scanning and transmission electron microscopies; and optical transmittance spectrophotometry. It was found that the BN films grown on the anode using the B 2 H 6 -H 2 -NH 3 mixture were smooth, dense, adhered well to substrates, and had a textured hexagonal structure with the basal planes perpendicular to the film surface. These films were chemically stable to moisture, even after an exposition period of two years. In contrast, the films grown on the anode from the B 2 H 6 -N 2 mixture showed tensile stress failure and were very unstable in the presence of moisture. However, the films grown on the cathode from B 2 H 6 -H 2 -NH 3 gases suffered from compressive stress failure on exposure to air; whereas with B 2 H 6 -N 2 gases, adherent and stable cathodic BN films were obtained with the same crystallographic texture as anodic films prepared from the B 2 H 6 -H 2 -NH 3 mixture. These results are discussed in terms of the origin of film stress,the effects of ion bombardment on the growing films, and the surface chemical effects of hydrogen atoms present in the gas discharge.

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“…6 shows the FT-IR spectra of the particle BN sample at room temperature. Two strong peaks around 1385 and 795 cm −1 could be observed clearly for the sample, which are assigned to the B-N stretching vibrations and B-N-B bending vibrations, respectively [19,20]. A weak peak around 3421 cm −1 could be attributed to the moisture absorbed on the surface of the sample.…”

Section: Tem Images and Saed Patternmentioning

confidence: 98%

A simple thermal decomposition–nitridation route to nanocrystalline boron nitride (BN) from a single N and B source precursor

Zhang

Chen

et al. 2011

Journal of Alloys and Compounds

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Characterization of boron nitride films deposited from BCl3-NH3-H2 mixtures in chemical vapour infiltration conditions

Cited by 99 publications

References 18 publications

Tunable porous boron nitride: Investigating its formation and its application for gas adsorption

Tunable porous boron nitride: Investigating its formation and its application for gas adsorption

Plasma-enhanced chemical vapor deposition of boron nitride thin films from B2H6–H2–NH3 and B2H6–N2 gas mixtures

A simple thermal decomposition–nitridation route to nanocrystalline boron nitride (BN) from a single N and B source precursor

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