Characterization of Boron-Doped Diamond Film

Abstract

Diamond films doped with boron were fabricated by the thermal filament CVD method. Powdered B2O3 was used as the doping source. The films were identified as diamond by means of several methods including Raman spectroscopy. The resistivity of the films was inversely proportional to the B/C ratio over four orders. The temperature dependence of current was measured and to fit this result to the theoretical calculation, the activation energy was evaluated.

Novel semiconductor materials for the development of chemical sensors and biosensors: A review

“…Since diamond is one of nature's best insulators doping is required for its use in electrochemical studies. Chemical Vapor Deposition (CVD) methods [89,90] can produce highly conductive boron doped diamond films [92]. The surface of as-grown undoped and boron-doped diamond films is relatively nonpolar, with the surface carbon atoms terminated by hydrogens [93].…”

A Brief Review on theIn SituSynthesis of Boron-Doped Diamond Thin Films

“…The conductivity of diamond thin films can be attuned to an application requirement typically by carrying out suitable doping events. Amongst the available conductive (doped, p-and n-type [9][10][11][12][13][14][15][16]) diamond thin films, the p-type semiconducting boron-doped diamond (BDD) thin films [17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] are the most popular ones and are being studied extensively. BDD thin films are synthesized by substituting some of the sp 3 hybridized carbon atoms in the diamond lattice with boron atoms.…”

Preparation of boron-doped semiconducting diamond films using BF3 and the electrochemical behavior of the semiconducting diamond electrodes

“…For the synthesis of boron-doped diamond (BDD) thin films by chemical vapor deposition (CVD), various boroncontaining compounds, e.g., diborane [1][2][3][4], trimethylboron [5,6], trimethyl borate [7], tripropyl borate [8], h-BN [9], B 2 O 3 [10][11][12][13] are used. Addition of boron not only makes synthesized diamond semiconducting but also affects various factors, e.g., growth rate, crystallinity and morphology of the diamond particles.…”