Characterization of Ba(Zr0.05 Ti0.95)O3 thin film prepared by sol-gel process

Abstract

Ba(Zr 0.05 Ti 0.95 )O 3 (BZT) thin film (∼330 nm) was grown on Pt/Ti/SiO 2 /Si(100) substrate by a simple sol-gel process. The microstructure and the surface morphology of BZT thin film were studied by X-ray diffraction and atomic force microscopy. The optical properties of BZT thin film were obtained by spectroscopic ellipsometry. The optical bandgap was found to be 3.74 eV of direct-transition type. Ferroelectric and dielectric properties of BZT thin film were also discussed. The electrical measurements were conducted on BZT films in metal-ferroelectric-metal (MFM) capacitor configuration. The results showed the film exhibited good ferroelectrity with remanent polarization and coercive electric field of 3.54 μC/cm 2 and 95.5 kV/cm, respectively. At 10 kHz, the dielectric constant and dielectric loss of the film are 201 and 0.029, respectively.

Crystallographic and Electrical Properties of Barium Zirconium Titanate Doped by Indium and Lanthanum

“…Table 1 and Fig. 5 show the results of this calculation, which are in the range found by others [4][5][6][7]. The spontaneous polarization of both BZLT and BZIT tend to decrease on increasing their respective dopant.…”

Optical and dielectric relaxor behaviour of Ba(Zr0.25Ti0.75)O3ceramic explained by means of distorted clusters

“…Recently, studies on the optical properties of crystalline and non-crystalline BZT thin films or bulk ceramics have been mainly focused on the infrared optical properties [28,29], complex refractive index [30][31][32] and photoluminescence (PL) [33][34][35][36]. In particular, the PL properties have been observed only in BZT thin films and powders prepared by the polymeric precursor method.…”

Surface chemical states of barium zirconate titanate thin films prepared by chemical solution deposition

“…Many efforts have been made to improve the dielectric properties of the BZT thin film capacitors, including using conductive oxide electrodes such as (La 0.7 Sr 0.3 )MnO 3 [12], LaNiO 3 [13,14], and (La 0.7 Ca 0.3 )MnO 3 [15]. Effect of seed layers on dielectric properties of Ba(Zr 0.3 Ti 0.7 )O 3 thin films [16], and infrared optical properties of BZT thin films have been reported [17][18][19].…”