Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

Bornholdt, S.; Wolter, Matthias; Kersten, Holger

doi:10.1140/epjd/e2010-00245-x

Cited by 84 publications

(50 citation statements)

References 32 publications

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“…Especially for the latter applications but also for the treatment of temperature sensitive materials like polymers, where the thermal load should be as low as possible to prevent the treated material from getting melted or burned, the knowledge of the energy fluxes and the resulting surface temperatures is of important interest. Even though the number of different atmospheric pressure plasma sources increased dramatically, only few applications of calorimetric probes for energy flux measurements can be found in the literature [40,41]. Due to the small size and strong spatial inhomogeneities, the interpretation of the measurements is quite difficult.…”

Section: Non-thermal Atmospheric Pressure Plasma Jetmentioning

confidence: 99%

“…Due to the small size and strong spatial inhomogeneities, the interpretation of the measurements is quite difficult. However, if a quantitative description cannot be given, at least the maximum substrate temperature [41], the temperature distribution across the substrate [101,102] or the ratios of the different contributions [40,41] are interesting and important characteristics.…”

Section: Non-thermal Atmospheric Pressure Plasma Jetmentioning

confidence: 99%

“…Also rf [24,[32][33][34][35][36] or microwave [24] plasmas and ion beams [37] for surface modification have been investigated. Further examples are hollow cathode plasma jets [21] and plasma downstream reactors (PDR) [15,38,39] or atmospheric pressure plasmas like plasma needle [40] and non-thermal atmospheric pressure plasma jets [41]. Since dusty plasmas received growing interest also the stationary temperature of micro particles (≈10-200 µm) which are confined in the sheath region are used to calculate energy fluxes towards their surfaces in order to obtain information about the surrounding plasma [42,43].…”

Section: Introductionmentioning

confidence: 99%

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Calorimetric Probes for Energy Flux Measurements in Process Plasmas

2014

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This chapter gives an overview of the method of calorimetric probes which are used for characterizing the interaction between low-temperature plasmas and substrates in materials processing. Although the focus is on low-temperature nonequilibrium plasmas most of the concepts can also be transferred to thermal plasmas or are in fact adopted from fusion research. An introductory section showing the importance and complexity of plasma wall interactions is followed by a section providing an overview and comparison of various probe concepts, which have been developed in the last decades. Special focus is on the type of probes which are similar to the probes used by J.A. Thornton (In fact, Thornton was not the first, to use this type of probe. From his work from 1978 [1], one can follow the citations back to the work of Jackson in 1969, who used equation (6.7) for the determination of the power dissipated by a copper block located at substrate position in a sputtering discharge [2]) who was one of the pioneers connecting plasma characteristics with resulting surface properties. Thereafter, a short section gives a basic overview of the different contributions to the total energy influx and which are of importance for the plasma wall interaction. The last section shows different examples of applications of calorimetric probes. It demonstrates the applicability and flexibility of these types of probes for characterization of different low-temperature plasmas. The examples

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Section: Non-thermal Atmospheric Pressure Plasma Jetmentioning

confidence: 99%

Section: Non-thermal Atmospheric Pressure Plasma Jetmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Calorimetric Probes for Energy Flux Measurements in Process Plasmas

2014

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“…Typical precursors for plasma enhanced chemical vapour deposition (PECVD) are, e.g. silane [1], hexamethyldisiloxane (HMDSO) [2,3], and aluminium tri-isopropoxide (ATI). In contrast to silicon-based precursors, which have been widely studied in plasmas, less work was done on the usage of aluminium-based precursors [4].…”

Section: Introductionmentioning

confidence: 99%

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Hübner¹,

Fröhlich²,

Tawidian³

et al. 2014

Contrib. Plasma Phys.

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International audienceIn Ar and Ar/N2 radio frequency (RF) discharges with admixtures of aluminium tri-isopropoxide (ATI) the fragmentation of this metal-organic precursor was studied by means of Fourier Transform Infrared (FTIR) spectroscopy using an optical long path cell providing an optical length of l= 17.2 m. The experiments were performed in an asymmetric capacitively coupled process plasma at a frequency of f= 13.56 MHz and at pressure values in the range of p= 1 - 10.5 Pa. The discharge power was chosen between P= 10 - 100 W. Using FTIR spectroscopy the evolution of the concentrations of ATI and of six stable molecules, CH4, C2H2, C2H4, C2H6, CO and HCN, was monitored under flowing conditions at gas flows of Φtotal= 0.5 - 14.5 sccm in the discharge. The concentrations of the reaction products were measured to be between 2 x 1012 molecules cm−3 as e.g. found for C2H4 and C2H6, and 5 x 1013 molecules cm−3, as e.g. in the case of CO. In the plasma a complete dissociation of the precursor ATI was found at a power value of about P= 80 W independent on the admixture of Ar or N2. The fragmentation efficiency (FE) of the reaction products which originate from the ATI molecules ranges between 0.2 and 4 x 1016 molecules J−1 while the fragmentation rate (FR) reached up to 2.5 x 1018 molecules s−1. The multi component detection ability of the spectrometer served to analyse the carbon balance of the by-product formation. For all experiments, the carbon balance never exceeded 25%. Therefore, in the plasmas the majority of the provided carbon is most likely deposited at the reactor walls or forms dust particles or higher molecular CxHy. The conversion efficiencies (CE) of the produced molecular species ranges between 0.1 x 1015 molecules J−1 for C2H4 and 5 x 1015 molecules J−1 for C2H6 depending on the discharge conditions of the RF plasma

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“…Further, the unique reactions occurring in atmospheric-pressure plasma are attracting considerable attention. Atmospheric-pressure plasma has been studied extensively [5] and is used in the areas of biotechnology, medical treatment [6][7][8][9][10], remediation of pollutants [7,11], nanotechnology [12,13], and surface processing [14,15]. C. Oliveira et al [14] investigated an argon-hydrogen atmospheric pressure microplasma jet for the treatment of materials, they clarified that Ar-H 2 microplasma jet powered by a commercial RF power source was employed to generate long non-thermal microplasma reaching up to 30 mm, which may be a suitable source of active chemical species.…”

Section: Introductionmentioning

confidence: 99%

Influence of gas flow on argon microwave plasma jet at atmospheric pressure

Iio

Yanagisawa

Uchiyama

et al. 2011

Surface and Coatings Technology

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Many kinds of an atmospheric-pressure plasma jet has been developed and used for widespread applications such as a surface treatment and modified. This study focused on the argon atmospheric-pressure microplasma jet generated by discharging of RF power of 2.45GHz microwave. The plasma jet shows sensitivity to surrounding environment; pressure, temperature and gaseous species. It is therefore absolutely imperative that a nature of atmospheric-pressure plasma jet should be understood from a point of fluid dynamics. This study, therefore, focused on the interrelationship between the plasma jet and the working gas.Motion of the plasma jet and the working gas were evaluated by velocity measurement and fast photography. As a result, the unsteady sinusoidal waving motion in the radial direction of a torch was observed. Advection velocity of the plasma in just downstream region of the torch exit increases with the supplying flow rate, and the velocity ratio is in the range of 0.75-0.87.

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Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

Cited by 84 publications

References 32 publications

Calorimetric Probes for Energy Flux Measurements in Process Plasmas

Calorimetric Probes for Energy Flux Measurements in Process Plasmas

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Influence of gas flow on argon microwave plasma jet at atmospheric pressure

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