2021
DOI: 10.1364/ao.421382
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Characterization of a chromatic confocal displacement sensor integrated with an optical laser head

Abstract: In this paper, the results of experimental characterization of an optical system consisting of a chromatic confocal displacement sensor integrated with an optical laser head are presented. As a result of integration, the part of the optical path of the displacement sensor was combined with the optical path of the laser beam. Consequently, a working distance of 250 mm for the optical system was achieved. The main aim of the characterization was to determine the calibration curve, as well as the application para… Show more

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Cited by 7 publications
(4 citation statements)
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“…In order to determine the distance (L) between the laser head nozzle (LHN) and the substrate material (S), an optical system developed by the authors was used ( Figure 1 ). Its detailed description, in terms of operating principle, parameters, and functionality, has been presented in previous publications [ 21 , 22 ]. In brief, the optical system is a modified version of the chromatic confocal sensor (CCS), which is commonly used as a stand-alone displacement sensor.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…In order to determine the distance (L) between the laser head nozzle (LHN) and the substrate material (S), an optical system developed by the authors was used ( Figure 1 ). Its detailed description, in terms of operating principle, parameters, and functionality, has been presented in previous publications [ 21 , 22 ]. In brief, the optical system is a modified version of the chromatic confocal sensor (CCS), which is commonly used as a stand-alone displacement sensor.…”
Section: Methodsmentioning
confidence: 99%
“…The developed LICCS system has an accuracy of 0.035 mm for the reference material (silver mirror) determined in accordance with the standard [ 25 ]. The accuracy value consists of trueness (the maximal difference between the measured sample position and the value derived from the calibration curve) and precision components (standard deviation of the error for approaching 0 mm displacement point) [ 21 ]. However, for the steel substrate, the average accuracy obtained is much higher, i.e., 0.09 mm and it is dependent on the surface quality of the sample.…”
Section: Methodsmentioning
confidence: 99%
“…At present, to fulfill the increasingly high requirements for sensors in various precision measurement fields, researchers have improved the chromatic confocal sensors from different aspects, such as increasing the measurement speed [12,13], expanding the measurement range [14,15], and improving the measurement accuracy [16,17]. In addition, they can also be used in more measurement scenarios [18,19].…”
Section: Introductionmentioning
confidence: 99%
“…Confocal spectral sensor [1,2] is a very important part of non-contact measurement of high-end precision instruments with rapid development in China. The spectral confocal sensor uses the linear one-to-one correspondence between different focusing distances and wavelengths established by the optical dispersion objective lens and returns the different wavelengths to the spectrometer through a splitting prism according to the principle of optical path reversibility, which is decoded and analyzed to obtain the position information, and then obtains the measured value.…”
Section: Introductionmentioning
confidence: 99%