Characterization of a back-illuminated CMOS camera for soft x-ray coherent scattering

Desjardins, Kewin; Popescu, Horia; Mercère, Pascal; Menneglier, Claude; Gaudemer, Roland; Thånell, Karina; Jaouen, N.

doi:10.1063/1.5084697

Cited by 17 publications

(22 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We also found and corrected the crosstalk phenomenon in the Gsense400BSI series [8] , which came from a design defect of the column structure. Several groups have studied the quantum efficiency of Gsense400BSI sensors with different coatings and the results showed generally good agreement with the theoretical curve [9], [10], [11] . Harada et al [11] presented a new design of the sensor SP3 based on Gsense400BSI, which has a reduced thickness of the entrance window to 5 nm.…”

Section: Introductionsupporting

confidence: 57%

Design and test results of scientific x-ray CMOS cameras

Wang

Ling

Zhang

et al. 2022

X-Ray, Optical, and Infrared Detectors for Astronomy X

View full text Add to dashboard Cite

In recent years, scientific CMOS (sCMOS) sensors have found increasing applications to X-ray detection, including Xray astronomical observations. In order to examine the performance of sCMOS sensors, we have developed X-ray cameras based on sCMOS sensors. Two cameras, CNX22 and CNX 66, have been developed using sCMOS sensors with a photosensitive area of 2 cm  2 cm and 6 cm  6 cm, respectively. The designs of the cameras are presented in this paper. The CNX22 camera has a frame rate of 48 fps, whereas CNX66 has a frame rate of currently 20 fps, that can be boosted to 100 fps in the future. The operating temperature of the sCMOS sensor can reach to -20C for CNX22 and -30C for CNX66 with a peltier cooler device. In addition to the commonly used mode of saving original images, the cameras provide a mode of real-time extraction of X-ray events and storage their information, which significantly reduces the requirement for data storage and offline analysis work. For both cameras, the energy resolutions can reach less than 200 eV at 5.9 keV using single-pixel events. These cameras are suitable for X-ray spectroscopy applications in laboratories and calibration for the space X-ray telescopes.

show abstract

Section: Introductionsupporting

confidence: 57%

Design and test results of scientific x-ray CMOS cameras

Wang

Ling

Zhang

et al. 2022

X-Ray, Optical, and Infrared Detectors for Astronomy X

View full text Add to dashboard Cite

show abstract

“…The minimum detectable change in optical density (OD) induced by the pump pulse in these experiments depends on the flux on the detector (photon statistics) as well as on data acquisition rate. We expect that the combination of highly efficient RZPA described in this paper with advanced sCMOS detectors [14] will allow in future the detection of OD<10 -3 even with sources delivering only a moderate photon flux per pulse.…”

Section: Conclusion and Futurementioning

confidence: 99%

Ultrafast NEXAFS spectroscopy in the lab using laser-based sources and advanced X-ray optics

Stiel

Braenzel

Tuemmler

et al. 2021

International Conference on X-Ray Lasers 2020

View full text Add to dashboard Cite

Laboratory based laser driven short pulse X-ray sources like laser produced plasmas (LPP) and high harmonic generation (HHG) exhibit a great potential for spectroscopy in the soft X-ray range. These sources are complementary to large scale facilities like synchrotrons or free electron lasers. For applications of LPP or HHG sources for time-resolved X-ray absorption spectroscopy in the water window or beyond a high photon flux is crucial. The available photon flux strongly depends on energy, pulse duration and repetition rate of the pump laser. Depending on the experimental needs in timeresolved experiments pulse durations of the X-ray pulse ranging from nanoseconds to sub-femtoseconds are required. In our contribution we will present a highly brilliant LPP source emitting soft X-rays in the photon energy range between 50 and 1500 eV based on CPA and thin disk laser technology as well as the high average power thin disk laser based OPCPA system for high photon flux HHG. In addition we present a new generation of reflection zone plates on spherical substrates, that promises a remarkable high resolution over a wide spectral range making it an ideal and highly efficient diffractive optic for time-resolved NEXAFS experiments in the lab.

show abstract

“…In this work, the feasibility of the method in the soft X-ray range is demonstrated in proof-of-concept measurements at the BESSY II synchrotron radiation facility, as well as in the laboratory. The superior energy resolution of the CMOS detector compared to common CCD detectors makes SF-GEXRF applicable in the soft X-ray range to investigate lighter elements such as

and

[ 23 , 24 , 25 ]. First, the results of SF-GEXRF measurements of a

grating at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility are presented.…”

Section: Introductionmentioning

confidence: 99%

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

et al. 2022

View full text Add to dashboard Cite

Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tender X-ray range. However, lighter elements such as oxygen, nitrogen or carbon cannot be efficiently investigated in this energy range, because of the ineffective excitation. Moreover, common CCD detectors are not able to discriminate between fluorescence lines below 1 keV. Oxygen and nitrogen are important components of insulation and passivation layers, for example, in silicon oxide or silicon nitride. In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The sample investigated is a Si3N4 lamellar grating, which represents 2D periodic nanostructures as used in the semiconductor industry. The emerging two-dimensional fluorescence patterns are recorded with a CMOS detector. To this end, energy-dispersive spectra are obtained via single-photon event evaluation. In this way, spatial and therefore angular information is obtained, while discrimination between different photon energies is enabled. The results are compared to calculations of the sample model performed by a Maxwell solver based on the finite-elements method. A first measurement is carried out at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility to demonstrate the feasibility of the method in the soft X-ray range. Furthermore, a laser-produced plasma source (LPP) is utilized to investigate the feasibility of this technique in the laboratory. The results from the BESSY II measurements are in good agreement with the simulations and prove the applicability of scan-free GEXRF in the soft X-ray range for quality control and process engineering of 2D nanostructures. The LPP results illustrate the chances and challenges concerning a transfer of the methodology to the laboratory.

show abstract

Characterization of a back-illuminated CMOS camera for soft x-ray coherent scattering

Cited by 17 publications

References 8 publications

Design and test results of scientific x-ray CMOS cameras

Design and test results of scientific x-ray CMOS cameras

Ultrafast NEXAFS spectroscopy in the lab using laser-based sources and advanced X-ray optics

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Contact Info

Product

Resources

About