Characterization and tribological evaluation of MW-PACVD diamond coatings deposited on pure titanium

Fu, Yong Qing; Yan, Bibo; Loh, Nee Lam; Sun, Chang Q.; Hing, Peter

doi:10.1016/s0921-5093(99)00782-0

Cited by 41 publications

(11 citation statements)

References 35 publications

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“…Potential problems associated with the micro-and nanocrystalline diamond films for MEMS applications include high deposition temperatures, low deposition rates, large intrinsic and thermal stresses, poor adhesion to the substrate and a high value of surface roughness [12][13][14]. The development of ultra-nanocrystalline (unc-) diamond technology by Argonne National Laboratory has solved some of these problems [6, [17][18][19].…”

Section: Preparation and Characterization Of Diamond And Dlc Filmsmentioning

confidence: 99%

Diamond and diamond-like carbon MEMS

Luo¹,

Fu²,

Le³

et al. 2007

J. Micromech. Microeng.

189

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Diamond and diamond-like carbon (DLC) thin films possess a number of unique and attractive material properties that are unattainable from Si and other materials. These include high values of Young's modulus, hardness, tensile strength and high thermal conductivity, low thermal expansion coefficient combined with low coefficients of friction and good wear resistance. As a consequence, they are finding increasing applications in micro-electro-mechanical systems (MEMS). This paper reviews these distinctive material properties from an engineering design point of view and highlights the applications of diamond and DLC materials in various MEMS devices. Applications of diamond and DLC films in MEMS are in two categories: surface coatings and structural materials. Thin diamond and DLC layers have been used as coatings mainly to improve the wear and friction of micro-components and to reduce stiction between microstructures and their substrates. The high values of the elastic modulus of diamond and DLC have been exploited in the design of high frequency resonators and comb-drives for communication and sensing applications. Chemically modified surfaces and structures of diamond and DLC films have both been utilized as sensor materials for sensing traces of gases, to detect bio-molecules for biological research and disease diagnosis.

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Section: Preparation and Characterization Of Diamond And Dlc Filmsmentioning

confidence: 99%

Diamond and diamond-like carbon MEMS

Luo¹,

Fu²,

Le³

et al. 2007

J. Micromech. Microeng.

189

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“…The above phenomenon is mainly because the diamond nucleation can only take place after the formation of a carbide layer on the Ti substrate surface. At the initial stage of deposition, there was competition between the carbide formation and the diamond nucleation [21,22]. Uniform nucleation of the diamond phase was only possible when the C concentration reached the critical concentration of nucleation.…”

Section: Resultsmentioning

confidence: 99%

Optimizing the Microstructure and Corrosion Resistance of BDD Coating to Improve the Service Life of Ti/BDD Coated Electrode

Ding

Zhang

et al. 2019

Materials

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The short service life of the Ti/BDD coated electrode is the main reason that limits its practical use. In this paper, the effect of structural change on the service life was studied using Ti/BDD coated electrodes prepared with the arc plasma chemical vapor deposition (CVD) method. It was found that the microstructural defects and corrosion resistance of BDD coatings were the main factors affecting the electrode service life. By optimizing the process parameters in different deposition stages, reducing the structural defects and improving the corrosion resistance of the BDD coating were conducted successfully, which increased the service life of the Ti/BDD coated electrodes significantly. The lifetime of the Ti/BDD samples increased from 360 h to 655 h under the electrolysis condition with a current density of 0.5 A/cm2, with an increase of 82%.

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“…Diamond and DLC can be deposited in the form of thin films using a variety of deposition techniques such as plasma enhanced chemical vapor deposition, plasma assisted chemical vapor deposition, microwave plasma chemical vapor deposition, ion beam deposition, pulsed laser ablations, filtered cathodic arc deposition, magnetron sputtering and DC plasma-jet chemical vapor deposition (Boudina et al 1992;Fu et al 2000;Santra et al 2012). Though the deposition of diamond and DLC include some inherent issues such as high deposition temperature (600-1000°C), large intrinsic and thermal stresses, low deposition rates, poor adhesion to substrate and higher values of surface roughness (Luo et al 2007), yet the use of diamond in high frequency applications (Baliga 1989;Taniuchi et al 2001) and realization of its membranes has been demonstrated (Davidson et al 1999;Kohn et al 1999).…”

Section: Case 2: Maximizing Diaphragm Resonance Frequency (Minimizingmentioning

confidence: 99%

Material selection for optimum design of MEMS pressure sensors

2019

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Choice of the most suitable material out of the universe of engineering materials available to the designers is a complex task. It often requires a compromise, involving conflicts between different design objectives. Materials selection for optimum design of a Micro-Electro-Mechanical-Systems (MEMS) pressure sensor is one such case. For optimum performance, simultaneous maximization of deflection of a MEMS pressure sensor diaphragm and maximization of its resonance frequency are two key but totally conflicting requirements. Another limitation in material selection of MEMS/ Microsystems is the lack of availability of data containing accurate micro-scale properties of MEMS materials. This paper therefore, presents a material selection case study addressing these two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby's method. First, data pertaining to micro-scale properties of MEMS materials has been consolidated and then the Performance and Material Indices that address the MEMS pressure sensor's conflicting design requirements are formulated. Subsequently, by using the micro-scale materials properties data, candidate materials for optimum performance of MEMS pressure sensors have been determined. Manufacturability of pressure sensor diaphragm using the candidate materials, pointed out by this study, has been discussed with reference to the reported devices. Supported by the previous literature, our analysis re-emphasizes that silicon with 110 crystal orientation [Si (110)], which has been extensively used in a number of micro-scale devices and applications, is also a promising material for MEMS pressure sensor diaphragm. This paper hence identifies an unexplored opportunity to use Si (110) diaphragm to improve the performance of diaphragm based MEMS pressure sensors.

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Characterization and tribological evaluation of MW-PACVD diamond coatings deposited on pure titanium

Cited by 41 publications

References 35 publications

Diamond and diamond-like carbon MEMS

Diamond and diamond-like carbon MEMS

Optimizing the Microstructure and Corrosion Resistance of BDD Coating to Improve the Service Life of Ti/BDD Coated Electrode

Material selection for optimum design of MEMS pressure sensors

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