2017
DOI: 10.1016/j.surfcoat.2017.07.084
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Characterization and tribologic study in high vacuum of hydrogenated DLC films deposited using pulsed DC PECVD system for space applications

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Cited by 29 publications
(11 citation statements)
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“…Furthermore, reduced take-off angle measurements provided information from greater depth, similarly to the measurements obtained from the bulk of the coating using Ar + sputtering The hardness values are summarized in Table 1. These properties were found to decrease as result of the silicon doping to 16.1 ± 1.0 GPa and 182.7 ± 7.0 GPa respectively, similar to other non-doped carbon films in the literature [45][46][47]. The addition of chromium reduced the hardness and reduced Young´s modulus compared to those values of the film solely doped with silicon, 13.5 ± 1 GPa and 160.0 ± 6.3 GPa, despite the increase in the sp 3 carbon content presented earlier.…”
Section: As-deposited Characterisationsupporting
confidence: 84%
“…Furthermore, reduced take-off angle measurements provided information from greater depth, similarly to the measurements obtained from the bulk of the coating using Ar + sputtering The hardness values are summarized in Table 1. These properties were found to decrease as result of the silicon doping to 16.1 ± 1.0 GPa and 182.7 ± 7.0 GPa respectively, similar to other non-doped carbon films in the literature [45][46][47]. The addition of chromium reduced the hardness and reduced Young´s modulus compared to those values of the film solely doped with silicon, 13.5 ± 1 GPa and 160.0 ± 6.3 GPa, despite the increase in the sp 3 carbon content presented earlier.…”
Section: As-deposited Characterisationsupporting
confidence: 84%
“…At present, the most popular friction mechanisms proposed are hydrogen passivation and rehybridization (sp 3 -to-sp 2 transformation). , Hydrogen doping in the carbon-based films is recognized as an effective way to realize low friction from both experimental and theoretical aspects. ,, DC.Lugo et al have concluded that friction coefficient of a-C:H films decreased with the increase in hydrogen content . They proposed two reasons that account for the low friction of a-C:H films: one is the hydrogen atoms saturating the dangling σ-bonds carbon at the interface, the other is the subsequent electrostatic repulsion between the two sliding surfaces .…”
Section: Introductionmentioning
confidence: 88%
“…Here, visible and ultraviolet­(UV) Raman spectra were measured by adopting 532 and 325 nm argon ion laser as the excitation source, respectively. The former was used to determine the hydrogen content in the films following an empirical method. ,, The latter mainly detected the structural arrangement of carbon atoms, which qualitatively evaluated the fraction of sp 2 -hybridized carbon atoms in the a-C and a-C:H films.…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…Among them, the most common deposition technique of DLC films is plasma-enhanced CVD [5]. It is worth mentioning that the DC-pulsed plasmaenhanced CVD is a novel method because it is simpler and can be used on an industrial scale at a lower cost [9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%