2016
DOI: 10.1016/j.ijleo.2015.11.126
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Characterization and studying of ZnO thin films deposited by spray pyrolysis: Effect of annealing temperature

Abstract: In this paper, we have investigated the annealing temperature influence on structural, morphological, optical and electrical properties for ZnO thin films deposited by spray pyrolysis technic. X-ray diffraction (XRD) results suggest that the preferred orientation changes from (1 0 1) direction in as-deposited films to (0 0 2) one after annealing and the crystallite size increases with annealing temperature. The scanning electron microscopy (SEM) shows that increasing annealing temperature improves the surface … Show more

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Cited by 49 publications
(19 citation statements)
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“…The quality of the ZnO films is typically determined regarding surface uniformity, transparency, conductivity, and crystalline orientation [27]. This quality is strongly affected by many factors such as the sol aging time [28,29], the concentration of the precursor [30][31][32][33], and the preheating and the postannealing temperatures [31,34,35]. In our previous paper [19], we studied the influence of the precursor concentration and annealing treatment on the structural and optical properties of sol-gel ZnO thin films.…”
Section: Introductionmentioning
confidence: 99%
“…The quality of the ZnO films is typically determined regarding surface uniformity, transparency, conductivity, and crystalline orientation [27]. This quality is strongly affected by many factors such as the sol aging time [28,29], the concentration of the precursor [30][31][32][33], and the preheating and the postannealing temperatures [31,34,35]. In our previous paper [19], we studied the influence of the precursor concentration and annealing treatment on the structural and optical properties of sol-gel ZnO thin films.…”
Section: Introductionmentioning
confidence: 99%
“…Various techniques have been used to prepare the ZnO thin films. These techniques include the chemical vapor deposition [10], electrochemical deposition [11], spray pyrolysis [12][13][14], sol-gel method [15][16][17]. Among the techniques mentioned above, the sol-gel process has attracted a great attention due to its excellent homogeneity, low cost, easy control of doping, and chemical composition, good reproducibility, lower crystallization temperature and large-area coating capability with high adhesion on different types of substrates [18].…”
Section: Introductionmentioning
confidence: 99%
“…Film tipis ZnO maupun ZnO doping telah dideposisikan dengan berbagai macam teknik, seperti sputtering [5][6][7] , MBE (molecular beam epitaxy) [8] , CVD (chemical vapor deposition) [9] , MOCVD (metal organic chemical vapor deposition) [4] , electrochemical deposition [10] , pulsed laser deposition [11] , sol-gel [12][13] dan spray [12,[14][15][16][17][18] . Dibandingkan dengan teknik lain, spray merupakan teknik yang sederhana, tidakvakum dan murah [17] .…”
Section: Pendahuluanunclassified
“…Peningkatan suhu perlakuan panas (500 dan 600 °C) memperlihatkan puncak-puncak difraksi yang sesuai dengan bidang kristal ZnO (100), (002), (101), (102), (110), (103) and (112) (ICDD 01-078-3315). Hal tersebut mengindikasikan bahwa film tipis AZO yang dihasilkan adalah polikristal dengan struktur heksagonal wurtzite [18] . Puncak difraksi dari hasil XRD menunjukkan tidak ada fase lain yang terbentuk.…”
Section: Hasil Dan Diskusiunclassified