Characterization and Modeling of Epitaxially Grown BST on a Conducting Oxide Electrode

Giant Critical Thickness in Highly Conducting Epitaxial SrMoO3 Electrodes Investigated by Lift‐Off Membranes

“…[ 2 ] From the viewpoint of electronic device applications, these results revived the concept of all‐oxide tuneable capacitors (varactors) in metal‐insulator‐metal (MIM) geometry. [ 2,12–16 ] For making use of all‐oxide varactors in microwave circuits, such as phase shifters or tuneable filters for microwave broadband antennas in 5G microelectronic devices, the bottom electrode of the varactor should be thicker than the electromagnetic skin depth in the desired frequency range to minimize electromagnetic losses. [ 17 ] For example, SrMoO 3 bottom electrodes with a resistivity below 20 µ$$\Omega$$ cm and a thickness of more than 5 µm are highly relevant for MIM‐type varactors operating at 5 GHz and beyond.…”