Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering

Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios

“…The TiVCr nitride coatings deposited at R N = 10% could therefore have higher crystallinity and larger grains than TiVCr alloy coatings. A similar investigation was reported in which the alloy coatings have an amorphous structure whereas the nitride coatings have an FCC crystal structure [28][29][30]. The coatings in this study were deposited at a substrate bias of −100 V. The energetic bombardments enhanced the mobility of lattice atoms in the deposited coatings, thereby improving film quality and increasing grain size.…”

“…No traces of other phases were observed in the pattern. V and Cr are the BCC structures, whereas Ti is a BCC structure at 1150 K, which [27][28][29][30]. The angle of the (1 1 0) lattice plane for the TiVCr alloy coating or the (2 0 0) lattice planes for the (TiVCr)N coatings was close to the average value of mixed Ti, V, and Cr, or TiN, VN, and CrN, respectively, as listed in Table 3.…”

“…Recent studies involving TiVCrZrY, AlCrTaTiZr, AlCrNbSiTiV, and TiAlCrNbY display simple solid solution structures and outstanding mechanical properties. These alloy coatings exhibit a hardness ranging from 6.8 to 13 GPa, which is higher than that of conventional metallic elements and binary alloys [27][28][29][30]. The hardness of the TiVCrZrY nitride coating reaches 17.5 GPa when deposited without substrate bias and/or heating [27], whereas AlCrTaTiZr and AlCrNbSiTiV nitride coatings possess high hardness values up to 35 and 41 GPa under biased and heated conditions, respectively [28,29].…”

“…The hardness of the TiVCrZrY nitride coating reaches 17.5 GPa when deposited without substrate bias and/or heating [27], whereas AlCrTaTiZr and AlCrNbSiTiV nitride coatings possess high hardness values up to 35 and 41 GPa under biased and heated conditions, respectively [28,29]. A TiAlCrNbY carbide coating using separate, pure metallic Ti, Al, Cr, Nb, and Y targets is reportedly softer (23.5 GPa) than aforementioned nitrides, but has superior tribological performance [30]. These confirm that the multi-component coatings are effective in increasing hardness.…”

Effects of substrate temperature and carbon content on the structure and properties of (CrCuNbTiY)C multicomponent coatings

“…The last decade has witnessed the rapid progress in the development of multi-principal-element (MPE) hard films [1][2][3][4][5][6][7][8][9][10]. Based on the principle of high-entropy alloys [11,12], comprising at least five principal metallic elements in near-equal atomic ratios, MPE nitride or carbide coatings have been increasingly investigated due to their unique combination of structural, mechanical and wear-corrosion-oxidation resistant characteristics.…”