Characteristics of piezoelectric cantilevers embedded in LTCC

Effects of CuO addition on the electrical responses of the low-temperature sintered Pb(Zr0.52Ti0.48)O3–Pb(Mg1/3Nb2/3)O3–Pb(Zn1/3Nb2/3)O3 ceramics

“…Hou et al have observed that the addition of CuO to 0.5 wt.% MnO 2 -added Pb((Zn 1/3 Nb 2/3 ) 0.20 (Zr 0.50 Ti 0.50 ) 0.80 )O 3 ceramics (PZNT) lowered the sintering temperature from 1050 to 900 • C, but the low-temperature sintered PZNT with 1.5 wt.% CuO addition showed low Q m and k p [12]. Therefore, it is necessary to lower the sintering temperature of materials with an internal content Ag electrode and enhance electrical properties of materials in order to apply in practice simultaneously [13,14].…”

Piezoelectric unimorph valve assembled on an LTCC substrate

“…The standard LTCC procedure was sufficient in manufacturing of the valve; however novel techniques to reduce post-processing and refinement of the valve structure and piezoelectric actuator should be introduced to decrease the size and improve the performance. For example, techniques to introduce embedded piezoelectric actuators into valve structures would decrease the post-processing and these will be studied in future work [19,20]. …”

Piezoelectric bimorph charge mode force sensor

“…The bimorph operates at the low voltage, linear region, electric field strengths being below 0.07 V/m. For piezoelectric benders much higher field strengths are typically needed to reach the non-linear region [23]. Furthermore, the structure of the force sensor is simple and very durable, and the sensor part is commercially available.…”