Piezoelectric bimorph charge mode force sensor

Kursu, Olli; Kruusing, Arvi; Pudas, Marko; Rahkonen, Timo

doi:10.1016/j.sna.2009.04.026

Cited by 21 publications

(13 citation statements)

References 20 publications

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“…Although this solution does not consider the external exciting force, the beam boundary conditions should be involved in solving (9). An external tip force F and a bender subjected to an external moment M ( Fig.…”

Section: Dynamic Equations Of the Bending Vibrationmentioning

confidence: 99%

“…There have been some research reports discussing the features and applications of piezoelectric bending mode element. [1][2][3][4][5][6][7][8][9][10][11][12][13] Par 2 discussed the constitutive relations of piezoelectric benders. The constituent equations for unimorphs (i.e., heterogeneous bimorphs), which are made up of two different materials, for quasi-static cases have been determined 3 by Smits et al The dynamic admittance matrix of piezoelectric cantilever bimorphs was provided 4 by Smits and Ballato in 1994.…”

Section: Introductionmentioning

confidence: 99%

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Theoretical analysis of dynamic property for piezoelectric cantilever triple-layer benders with large piezoelectric and electromechanical coupling coefficients

Gong

Pan

et al. 2016

J. Adv. Dielect.

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Ferroelectric single crystals, such as PZN-PT, provide novel prospects in piezoelectric bending devices such as actuators, sensors or energy harvesters because of their extraordinarily large piezoelectric coefficients. However, large errors may occur in some analyses on electromechanical behaviors using the conventional models. We find the bending rigidity of piezoelectric composited bender is affected not only by thickness, width and the modulus of elasticity of the different layers but also electromechanical coupling coefficients (EMCCs) of the piezoelectric material and the larger EMCCs mean more marked effect. This paper focuses on the derivation of the applied input excitation and output response characteristics in the circular frequency domain for piezoelectric cantilever triple-layer benders (PCTBs), taking into account the secondary piezoelectric effect. Analytic dynamic descriptions of such actuators and transducers are obtained. Based on the presented models dynamic features of PCTB composed of PZN-8%PT are calculated, and numerical results coincide with simulations using the finite element method (FEM).

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Section: Dynamic Equations Of the Bending Vibrationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Theoretical analysis of dynamic property for piezoelectric cantilever triple-layer benders with large piezoelectric and electromechanical coupling coefficients

Gong

Pan

et al. 2016

J. Adv. Dielect.

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show abstract

“…ANSYS is also used to aid the design of a vibration control system for high-rise buildings to suppress earthquake movement by Preumont and Seto in [92]. Other commercial finite element packages are also used in the simulation of vibration dynamics for AVC systems such as COM-SOL Multiphysics which is particularly suited for vibration-related applications in MEMS [25,60,86,107]. Yet another commercial FEM package is MSC/NASTRAN which is widely utilized for vibration and vibration control-related analysis as well [17,76,117].…”

Section: Fem Analysismentioning

confidence: 99%

Laboratory Demonstration Hardware for AVC

Takács

Rohal’-Ilkiv

2012

Model Predictive Vibration Control

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“…In the constitutive equations, the electromechanical coupling is presented as an additional stiffness matrix. Kursu et al [12] presented an analytical model and a finite element analysis for a planar, parallel and symmetric piezoelectric bimorph structure. Dong et al [13] fabricated piezoelectric MC with two-segment top electrodes and verified the actuation and sensing capability of each segment.…”

Section: Introductionmentioning

confidence: 99%

Effect of geometrical and environmental parameters on vibration of multi-layered piezoelectric microcantilever in amplitude mode

2015

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In this paper, the vibration motions of multilayered piezoelectric microcantilevers (MCs) are analyzed in which these MCs are able to perform both actuating and sensing of tip deflection simultaneously. With respect to the presence of piezoelectric layers, these MCs modeled in several structures such as two layers and two segments. The governing equations of motion for these MCs are obtained using Hamilton's principle. It should be noted that the microcantilever (MC) is modeled as a continuous beam based on Euler-Bernoulli beam theory. Then, the obtained differential equation is solved by finite element method and the time response is obtained using Newmark method. In simulation of the vibrating behavior of MCs in contact mode, the flexible beam model includes attractive, adhesive and repulsive forces, as well as the interaction of the capillary fluid layers. In order to study vibrating motion of MC, the effect of air moisture and the tip-sample equilibrium distance as environmental parameters on the amplitude and current output are investigated, and also, a sensitivity analyses are conducted on the amplitude and current output of sensor in terms of the geometrical parameters of the MC layers and the results are analyzed.

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Piezoelectric bimorph charge mode force sensor

Cited by 21 publications

References 20 publications

Theoretical analysis of dynamic property for piezoelectric cantilever triple-layer benders with large piezoelectric and electromechanical coupling coefficients

Theoretical analysis of dynamic property for piezoelectric cantilever triple-layer benders with large piezoelectric and electromechanical coupling coefficients

Laboratory Demonstration Hardware for AVC

Effect of geometrical and environmental parameters on vibration of multi-layered piezoelectric microcantilever in amplitude mode

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