Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition

Takaki, Koichi; Kumagai, Osamu; Hasegawa, R.; Mukaigawa, Seiji; Fujiwara, Tamiya; Kumagai, Masao; Yukimura, Ken

doi:10.1016/j.tsf.2005.08.163

Cited by 14 publications

(7 citation statements)

References 16 publications

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“…In a previous study, a significantly different value of 4 km/s has been reported using an image converter camera. 39) In general, the plasma flow affects the ion saturation current. If the plasma velocity is assumed to be 4 km/s, the maximum error in the obtained ion density is estimated to be 20% at an electron temperature of 4 eV.…”

Section: Spatial Ion Distributionmentioning

confidence: 99%

Temporal and spatial distributions of carbon shunting arc plasma

Takaki¹,

Konishi²,

Mikawa³

et al. 2014

Jpn. J. Appl. Phys.

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The temporal and spatial distributions of a magnetically driven shunting arc plasma were obtained using time-resolved probe measurement. A shunting arc was produced using a carbon rod and accelerated along a pair of rail electrodes by a Lorenz force. The pulse current for driving and maintaining the plasma was supplied from a 20 µF capacitor charged by a dc power supply. Double and single probes were employed to obtain the ion density of the shunting arc plasma. An ion density of 1 × 1019 m−3 was obtained at a distance of 50 mm from the carbon rod 15 µs after applying voltage. The ion density decreased to 2.0 × 1018 m−3 with increasing distance from 50 to 150 mm. The ion density changed with the energy inputted into the plasma.

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Section: Spatial Ion Distributionmentioning

confidence: 99%

Temporal and spatial distributions of carbon shunting arc plasma

Takaki¹,

Konishi²,

Mikawa³

et al. 2014

Jpn. J. Appl. Phys.

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“…A shunting arc discharge can be used as an ion source of metals and semi-metal materials, such as titanium, tungsten, silicon, and carbon, and is ignited without any trigger source at a wide range of gas pressures from vacuum to atmospheric pressure under identical discharge conditions [98,115]. The shunting arc is ignited or triggered by self-heating of the rod to increase the vapor pressure and/or to emit thermoelectrons around a rod, as shown in Figure 19.…”

Section: Ion Source For Materials Processmentioning

confidence: 99%

Industrial Applications of Pulsed Power Technology

Takaki

Katsuki

2009

IEEJ Trans. FM

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A review of mainly the past two years is undertaken of the industrial applications of pulsed power. Repetitively operated pulsed power generators with a moderate peak power have been developed for industrial applications. These generators are reliable and have low maintenance. Development of the pulsed power generators helps promote industrial applications of pulsed power for such things as food processing, medical treatment, water treatment, exhaust gas treatment, ozone generation, engine ignition, ion implantation and others. Here, industrial applications of pulsed power are classified by application for biological effects, for pulsed streamer discharges in gases, for pulsed discharges in liquid or liquidmixture, and for material processing.Index Terms -Pulsed power, industrial application, bioelectrics, exhaust gas treatment, discharge in liquid, material processing.

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“…C-DLC and S-DLC coatings of 1.2 µm thickness were deposited by Plasma-Based Ion Implantation and Deposition (PBII&D), which is described in detail elsewhere (22)(23) . Figure 2 shows the method used to prepare S-DLC films.…”

Section: Deposition Conditions Of Dlc Filmsmentioning

confidence: 99%

Development of Antiwear Shim Inserts Utilizing Segment-Structured DLC Coatings

Takashima

Kuroda

Saito

et al. 2009

JMMP

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Wear and fretting fatigue are important technological problems in automotive, railway and aerospace fields. The purpose of this study is to find a method of reducing the wear of cast-iron (FCD)/aluminum components, which are often applied to automotives, and thus extend their lifetime. First, a stainless-steel (SUS) shim was designed, which can be inserted between an FCD plate and an aluminum plate. Second, diamond-like carbon (DLC) coatings were applied to the shim inserts to prevent the FCD and aluminum plates from wear. Then, the tribological and fatigue characteristics of the shim were evaluated by a ball-on-disk (BoD) test and a bending fatigue test of up to 1×10 6 cycles. Each substrate was coated with DLC by Plasma-Based Ion Implantation and Deposition (PBII&D). A unique feature of our shim is that a segment-structured DLC film (S-DLC) is employed as well as a continuous DLC (C-DLC) film. The effect of the DLC coating on reducing the damage to the Al plate was apparent, because the surface roughness of the Al plate abraded with the DLC-coated shim was significantly smaller than that abraded directly with the FCD plate. Moreover, the average damage fraction to the C-DLC coating is approximately 20-fold larger than that to the S-DLC coating. The C-DLC film suffers severe damage near the bolt hole, whereas the S-DLC film suffered almost no damage even after 1×10 6 bending cycles. In conclusion, an S-DLC-coated SUS shim has a marked effect on reducing the wear of Al/FCD components and improving their lifetime.

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Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition

Cited by 14 publications

References 16 publications

Temporal and spatial distributions of carbon shunting arc plasma

Temporal and spatial distributions of carbon shunting arc plasma

Industrial Applications of Pulsed Power Technology

Development of Antiwear Shim Inserts Utilizing Segment-Structured DLC Coatings

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