Temporal and spatial distributions of carbon shunting arc plasma

Abstract

The temporal and spatial distributions of a magnetically driven shunting arc plasma were obtained using time-resolved probe measurement. A shunting arc was produced using a carbon rod and accelerated along a pair of rail electrodes by a Lorenz force. The pulse current for driving and maintaining the plasma was supplied from a 20 µF capacitor charged by a dc power supply. Double and single probes were employed to obtain the ion density of the shunting arc plasma. An ion density of 1 × 1019 m−3 was obtained at a distance of 50 mm from the carbon rod 15 µs after applying voltage. The ion density decreased to 2.0 × 1018 m−3 with increasing distance from 50 to 150 mm. The ion density changed with the energy inputted into the plasma.

Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

“…27) The probe has two cylindrical stainless steel electrodes with a diameter of 0.5 mm and exposed length of 3 mm. 28) The distance between the electrodes is 8.5 mm. The potential of the probe is varied from −23 to 23 V using a variable resistor and dc power supply.…”