Characteristics of ITO films deposited on a PET substrate under various deposition conditions

Lee, Jung Rak; Lee, Dong Yeop; Kim, Do Geun; Lee, Gun Hwan; Kim, Jae Won; Song, Pung Keun

doi:10.1007/bf03027991

Cited by 3 publications

(2 citation statements)

References 11 publications

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“…However, because of extremely low measurement throughput of scanning methods, they are not suitable for practical applications that demand a high measurement throughput. Non-scanning probe methods such as electron microscopies [8], [9], terahertz-time domain spectroscopy [10], and thermography [11], [12] can provide an excellent measurement throughput. However, they have…”

Section: Introductionmentioning

confidence: 99%

Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

2019

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We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ∼ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology. INDEX TERMS Microwave imaging, defect detection, optical inspection technology.

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Section: Introductionmentioning

confidence: 99%

Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

2019

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“…Numerous characterization techniques having potential for uniformity inspection of thin films have been proposed: electrical measurements such as four point probe method for conductivity as well as optical microscopy, profilometry, atomic force microscopy, X-ray photoelectron spectroscopy, spectroscopic ellipsometry, and electron microscopy for topological and dimensional characterization [3,8,[10][11][12][13]. Unfortunately, these methods are typically intended for areas on nanometer to millimeter scale only thus encountering challenges with large area samples.…”

Section: Introductionmentioning

confidence: 99%

Thermography based online characterization of conductive thin films in large-scale electronics fabrication

2018

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Flexible electronics is an emerging thin film based technology enabling completely new types of products and applications compared to conventional electronics. Since the quality of films defines the functionality of fabricated devices, the lack of suitable online manufacturing quality assessment tools has been identified to be a critical bottleneck while upscaling the volume and the yield of thin film electronics manufacturing. In order to solve that problem, a synchronized thermography (ST) based online measurement system was built. Applicability of proposed roll-to-roll compatible ST based system was demonstrated by characterizing a moving plastic film with conductive indium tin oxide on top. Obtained results show that ST can be utilized for online homogeneity characterization and sheet resistance estimation of large area thin films which are not possible with other existing methods.

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Optical and Electrical Properties of Indium Tin Oxide (ITO) Thin Films Prepared by Thermal Evaporation Method on Polyethylene Terephthalate (PET) Substrate

Ali

Ibrahim

Pakhuruddin

et al. 2012

AMR

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This work describe the optical and electrical properties of indium tin oxide (ITO) thin films prepared by thermal evaporation method on flexible plastic substrate (polyethylene terephthalate (PET)). The optical transmission and absorption of ITO films in the visible and UV rang have been studied. The resistivity, sheet resistant, carrier concentration and mobility have been evaluated by Hall Effect measurement. The surface morphology and roughness were investigated by atomic force microscopy (AFM). The results indicate that the optical transmission greater than 85% over the visible rang and it was found to be strongly dependent on the thickness of ITO films. The Resistivity and sheet resistant with low values (10-4Ω-cm, 9.22 Ω/ respectively) were obtained and ties values were increased with ITO thin films thickness increasing .AFM investigation showed that the roughness surface of (8 – 30) RMS have been obtained over different thickness of ITO films. The obtained results of the deposited films by this method were analyzed. Details of sample preparation, experimental methods and results are given and discussed.

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Characteristics of ITO films deposited on a PET substrate under various deposition conditions

Cited by 3 publications

References 11 publications

Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

Thermography based online characterization of conductive thin films in large-scale electronics fabrication

Optical and Electrical Properties of Indium Tin Oxide (ITO) Thin Films Prepared by Thermal Evaporation Method on Polyethylene Terephthalate (PET) Substrate

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