Characteristics of indium tin oxide thin films prepared using electron beam evaporation

Yamaguchi, M.; Ide‐Ektessabi, Ari; Nomura, Hiroshi; Yasui, Nobuto

doi:10.1016/j.tsf.2003.09.033

Cited by 66 publications

(44 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…The XPS spectra show binding energies of 444.8 eV for In ͑3d͒, 486.9 eV for Sn ͑3d͒ and two values, 530.3 and 531.9 eV for O ͑1s͒, in agreement with previously reported results in different indium tin oxide systems. 2,5,16,17 The relative intensities of the two O ͑1s͒ components depend on the region probed, being the 531.9 eV component more intense in regions with high In concentration. This is shown in the XPS spectra of Fig.…”

Section: -3mentioning

confidence: 99%

Thermal growth and structural and optical characterization of indium tin oxide nanopyramids, nanoislands, and tubes

Maestre

Cremades

Piqueras

et al. 2008

Journal of Applied Physics

View full text Add to dashboard Cite

In-doped SnO 2 microtubes as well as Sn-doped In 2 O 3 ͑ITO͒ nano-and microislands have been grown by thermal treatment of compacted SnO 2 -In 2 O 3 powders under argon flow at 1350°C in a catalyst-free process. The SnO 2 tubes contain about 1 at. % of In, even when the In content in the starting mixture was as high as 52 at. %. However, the ITO nanoislands and nanopyramids, grown preferentially on the faces and edges of the tubes, present an In content up to six times higher than the tubes. Spatially resolved cathodoluminescence shows a higher emission from the Sn-rich structures, so that the In-rich ITO nanoislands show dark contrast in the CL images. CL spectra show that the main emission bands in both, Sn-rich and In-rich, structures, are related to oxygen deficiency. X-ray photoelectron spectroscopy shows differences between the tubes and the nanoislands in the O ͑1s͒ spectral region. In particular, a component at 531.9 eV of the O ͑1s͒ signal appears enhanced in the In-rich islands.

show abstract

Section: -3mentioning

confidence: 99%

Thermal growth and structural and optical characterization of indium tin oxide nanopyramids, nanoislands, and tubes

Maestre

Cremades

Piqueras

et al. 2008

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

“…Spin orbital splittings of a core level of a particular element in different compounds are nearly the same, and so it happens with peak area ratios. This is characteristic of ITO, as some references in the literature show [34,35].…”

Section: X-ray Photoelectron Spectroscopymentioning

confidence: 76%

Organosilane-functionalization of nanostructured indium tin oxide films

et al. 2016

View full text Add to dashboard Cite

Fabrication and organosilane-functionalization and characterization of nanostructured ITO electrodes are reported. Nanostructured ITO electrodes were obtained by electron beam evaporation, and a subsequent annealing treatment was selectively performed to modify their crystalline state. An increase in geometrical surface area in comparison with thin-film electrodes area was observed by atomic force microscopy, implying higher electroactive surface area for nanostructured ITO electrodes and thus higher detection levels. To investigate the increase in detectability, chemical organosilane-functionalization of nanostructured ITO electrodes was performed. The formation of 3-glycidoxypropyltrimethoxysilane (GOPTS) layers was detected by X-ray photoelectron spectroscopy. As an indirect method to confirm the presence of organosilane molecules on the ITO substrates, cyclic voltammetry and electrochemical impedance spectroscopy (EIS) were also carried out. Cyclic voltammograms of functionalized ITO electrodes presented lower reduction-oxidation peak currents compared with non-functionalized ITO electrodes. These results demonstrate the presence of the epoxysilane coating on the ITO surface. EIS showed that organosilane-functionalized electrodes present higher polarization resistance, acting as an electronic barrier for the electron transfer between the conductive solution and the ITO electrode. The results of these electrochemical measurements, together with the significant difference in the X-ray spectra between bare ITO and organosilane-functionalized ITO substrates, may point to a new exploitable oxide-based nanostructured material for biosensing applications. As a first step towards sensing, rapid functionalization of such substrates and their application to electrochemical analysis is tested in this work. Interestingly, oxide-based materials are highly integrable with the silicon chip technology, which would permit the easy adaptation of such sensors into lab-on-a-chip configurations, providing benefits such as reduced size and weight to facilitate on-chip integration, and leading to low-cost mass production of microanalysis systems.

show abstract

“…They deposited them using spray pyrolysis following the method developed by Kavan and Grätzel [6]. Single layer deposition techniques have been reported for the ITO [7][8][9] and TiO 2 films [10][11][12]. In this work, we report on the successful deposition of single and multilayer of ITO and anatase TiO 2 using RPLAD technique.…”

Section: Introductionmentioning

confidence: 99%

Structural properties of single and multilayer ITO and TiO2 films deposited by reactive pulsed laser ablation deposition technique

Ngaffo

Caricato

Fernández

et al. 2007

Applied Surface Science

View full text Add to dashboard Cite

Characteristics of indium tin oxide thin films prepared using electron beam evaporation

Cited by 66 publications

References 10 publications

Thermal growth and structural and optical characterization of indium tin oxide nanopyramids, nanoislands, and tubes

Thermal growth and structural and optical characterization of indium tin oxide nanopyramids, nanoislands, and tubes

Organosilane-functionalization of nanostructured indium tin oxide films

Structural properties of single and multilayer ITO and TiO2 films deposited by reactive pulsed laser ablation deposition technique

Contact Info

Product

Resources

About