Characteristics of graphene grown through low power capacitive coupled radio frequency plasma enhanced chemical vapor deposition

Chang, Yu; Yen, Chun Chieh; Tsai, Hung Chieh; Chen, Tsung Cheng; Yang, Chia−Ming; Chen, Chia Hao; Woon, Wei Yen

doi:10.1016/j.carbon.2019.12.093

Cited by 21 publications

(14 citation statements)

References 31 publications

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“…The placement of the copper foil for graphene growth. Plasma can effectively promote the decomposition of hydrocarbon precursor, and a mass of plasma-generated ions and radicals, such as Ar ions, cause drastic bombardment 26 . In addition, high densities of H atoms and other free radicals cause excessive etching of graphene 34,40 .…”

Section: Resultsmentioning

confidence: 99%

“…Therefore, PECVD shows considerable potential for low-temperature graphene preparation. Researchers have achieved the low-temperature growth of graphene thin films by PECVD on transition metal substrates such as nickel [22][23][24] , copper (Cu) [25][26][27] , and cobalt 28 , dielectric substrates [29][30][31] , and other 2-dimensional materials 32 .…”

Section: Nucleation and Growth Dynamics Of Graphene Grown By Radio Frmentioning

confidence: 99%

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Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

Zhen

Zhang

et al. 2021

Sci Rep

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We investigated the nucleation and grain growth of graphene grown on Cu through radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at different temperatures. A reasonable shielding method for the placement of copper was employed to achieve graphene by RF-PECVD. The nucleation and growth of graphene grains during PECVD were strongly temperature dependent. A high growth temperature facilitated the growth of polycrystalline graphene grains with a large size (~ 2 μm), whereas low temperature induced the formation of nanocrystalline grains. At a moderate temperature (790 to 850 °C), both nanocrystalline and micron-scale polycrystalline graphene grew simultaneously on Cu within 60 s with 50 W RF plasma power. As the growth time increased, the large graphene grains preferentially nucleated and grew rapidly, followed by the nucleation and growth of nanograins. There was competition between the growth of the two grain sizes. In addition, a model of graphene nucleation and grain growth during PECVD at different temperatures was established.

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Section: Resultsmentioning

confidence: 99%

Section: Nucleation and Growth Dynamics Of Graphene Grown By Radio Frmentioning

confidence: 99%

Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

Zhen

Zhang

et al. 2021

Sci Rep

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“…To further obtain the microscopic structural information of the samples, Raman analysis is carried out, as presented in Figure c. As can be clearly seen, CVDG and RGO both show a characteristic D band at around 1350 cm –1 and G band at around 1580 cm –1 , which are attributed to the sp 3 defect and graphitic sp 2 carbons, respectively. , Since the intensity ratio of the D and G bands ( I D / I G ) is an important parameter for measuring the relative concentration of local defects or disorders in graphene nanosheets, the remarkably lower I D / I G value of CVDG (0.40) than that of RGO (0.97) indicates a high graphitization degree. In other words, CVDG possesses markedly lower defect density than RGO .…”

Section: Results and Discussionmentioning

confidence: 99%

Insight into the Real Efficacy of Graphene for Enhancing Photocatalytic Efficiency: A Case Study on CVD Graphene-TiO₂ Composites

Huang

Wang

et al. 2021

ACS Appl. Energy Mater.

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Construction of graphene-based composites has been a popular theme in solar energy harvesting and conversion, yet the understanding of the real efficacy of graphene for enhancing photocatalytic efficiency is hampered by the gap of physicochemical properties between the defined graphene and the graphene used in research laboratories. Here, we purposely synthesize a high-quality chemical vapor deposition graphene (CVDG) as a model material to integrate with TiO 2 , which demonstrates that photocatalytic performance can be greatly improved by controlling the quality of graphene. Under the same reaction conditions, the as-prepared CVDG-TiO 2 displays a 26.2-times and 10-times higher photocatalytic hydrogen evolution activity than bare TiO 2 and its counterpart, reduced graphene oxide (RGO)-TiO 2 , respectively. Experimental characterization reveals that the few-layer CVDG with a low defect density is able to better unleash the excellent electrical conductivity potential of graphene, by which the separation and lifetime of photoexcited charge carriers of graphene-TiO 2 could be improved more efficiently. The research highlights the significant effect of the quality of graphene for the construction of more efficient semiconductor-graphene composites, which is anticipated to inform ongoing efforts on exploiting high-quality graphene to advance solar energy harvesting and conversion.

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“…Yen et al successfully prepared a single layer of graphene film of full-coverage over the substrate in less than 30 s using the CCP system [112]. The vacancy defects, which might be caused by the synthesis process of the graphene growth, was examined to adsorb gases, and it was found that the vacancy defects could promote changes of charge transfer in the graphene film with a response of about 6% under 100 ppb of NO 2 [113]. electric field in the vicinity of the substrate surface, especially on the top side of a textured silicon wafer of a pyramid nature, which leads to electric field enhancement and graphene deposition.…”

Section: Radio Frequencymentioning

confidence: 99%

Chemical Vapour Deposition of Graphene—Synthesis, Characterisation, and Applications: A Review

et al. 2020

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Graphene as the 2D material with extraordinary properties has attracted the interest of research communities to master the synthesis of this remarkable material at a large scale without sacrificing the quality. Although Top-Down and Bottom-Up approaches produce graphene of different quality, chemical vapour deposition (CVD) stands as the most promising technique. This review details the leading CVD methods for graphene growth, including hot-wall, cold-wall and plasma-enhanced CVD. The role of process conditions and growth substrates on the nucleation and growth of graphene film are thoroughly discussed. The essential characterisation techniques in the study of CVD-grown graphene are reported, highlighting the characteristics of a sample which can be extracted from those techniques. This review also offers a brief overview of the applications to which CVD-grown graphene is well-suited, drawing particular attention to its potential in the sectors of energy and electronic devices.

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Characteristics of graphene grown through low power capacitive coupled radio frequency plasma enhanced chemical vapor deposition

Cited by 21 publications

References 31 publications

Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

Insight into the Real Efficacy of Graphene for Enhancing Photocatalytic Efficiency: A Case Study on CVD Graphene-TiO₂ Composites

Chemical Vapour Deposition of Graphene—Synthesis, Characterisation, and Applications: A Review

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Characteristics of graphene grown through low power capacitive coupled radio frequency plasma enhanced chemical vapor deposition

Cited by 21 publications

References 31 publications

Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

Insight into the Real Efficacy of Graphene for Enhancing Photocatalytic Efficiency: A Case Study on CVD Graphene-TiO2 Composites

Chemical Vapour Deposition of Graphene—Synthesis, Characterisation, and Applications: A Review

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Insight into the Real Efficacy of Graphene for Enhancing Photocatalytic Efficiency: A Case Study on CVD Graphene-TiO₂ Composites