Challenges in making of thin films for LixMnyO4 rechargeable lithium batteries for MEMS

Singh, Deepika; Houriet, R.; Giovannini, Roberto; Hofmann, Heinrich; Crăciun, V.; Singh, Rajiv K.

doi:10.1016/s0378-7753(01)00704-2

Cited by 28 publications

(16 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Singh et al characterized the crystallinity and texture of LMO films deposited at Ts = 650 °C. Here, (111)-oriented films were grown on a doped Si substrate, while films deposited on a stainless-steel substrate exhibited a (001) orientation [140]. The thermo-power (or Seebeck coefficient) of PLD LMO films was reported to be 70 µV·K −1 [141].…”

Section: Limn 2 O 4 (Lmo)mentioning

confidence: 99%

“…Electrical measurements of LMO films showed that the conductivity is sensitive to T s , as the activation energy that followed the Mott's rule increased with T s up to E a = 0.64 eV at T s = 600 • C [133]. Singh et al characterized the crystallinity and texture of LMO films deposited at T s = 650 • C. Here, (111)-oriented films were grown on a doped Si substrate, while films deposited on a stainless-steel substrate exhibited a (001) orientation [140]. The thermo-power (or Seebeck coefficient) of PLD LMO films was reported to be 70 µV·K −1 [141].…”

Section: Limn 2 O 4 (Lmo)mentioning

confidence: 99%

See 1 more Smart Citation

Pulsed Laser Deposited Films for Microbatteries

Julien

Mauger

2019

Coatings

View full text Add to dashboard Cite

This review article presents a survey of the literature on pulsed laser deposited thin film materials used in devices for energy storage and conversion, i.e., lithium microbatteries, supercapacitors, and electrochromic displays. Three classes of materials are considered: Positive electrode materials (cathodes), solid electrolytes, and negative electrode materials (anodes). The growth conditions and electrochemical properties are presented for each material and state-of-the-art of lithium microbatteries are also reported.

show abstract

Section: Limn 2 O 4 (Lmo)mentioning

confidence: 99%

Section: Limn 2 O 4 (Lmo)mentioning

confidence: 99%

Pulsed Laser Deposited Films for Microbatteries

Julien

Mauger

2019

Coatings

View full text Add to dashboard Cite

show abstract

“…1,2 Lithium-transition metal oxides such as LiCoO 2 and LiMn 2 O 4 are widely used for the cathode material. 1,2 Lithium-transition metal oxides such as LiCoO 2 and LiMn 2 O 4 are widely used for the cathode material.…”

Section: Introductionmentioning

confidence: 99%

Lithium manganese oxide films fabricated by electron beam directed vapor deposition

Jin

Wadley

2007

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

View full text Add to dashboard Cite

Articles you may be interested inElectron beam physical vapor deposition of thin ruby films for remote temperature sensing Study of amorphous lithium silicate thin films grown by atomic layer deposition J. Vac. Sci. Technol. A 30, 01A106 (2012); 10.1116/1.3643349 Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering Lithium manganese oxide thin films have been grown using a gas jet based, electron beam directed vapor deposition technique. The deposition rate could be controlled by the electron beam power as well as the gas jet density and speed. This enabled films to be grown at deposition rates up to 16 nm/ s which is a significantly higher deposition rate than that reported for the growth of this material by sputtering and other vapor deposition techniques. The lithium manganese oxide films grown by this approach were slightly manganese deficient with a composition Li 1+x Mn 2−y O 4 , where 0.08Ͻ x Ͻ 0.125 and y ϳ 0.2. After annealing in air at 700°C, thin films grown with a low jet speed had a cubic spinel structure and were composed of very small size grains. The small grain size resulted from the vapor phase formation of clusters and resulted in a nanocrystalline random film texture. These films were highly porous with a spongelike interconnected pore network. The use of a higher jet speed and lower growth pressure resulted in less vapor phase clustering. The films contained small, uniformly distributed pores and exhibited a significant ͗111͘ texture. These annealed films appeared well suited for use as the cathode layers in thin film Li/ Li-ion batteries.

show abstract

“…Since Shokoohi et al reported their work [1], much research [2][3][4][5][6][7][8] has been performed on battery component materials (cathode, electrolyte and anode) and thin-film Li batteries, some of which reached the fabrication of a mesa type of all-solid-state Li thin film battery [4,6,8]. In these works, sputtered Lipon films (Li 3 PO 4 :N) were adopted as an electrolyte layer.…”

Section: Introductionmentioning

confidence: 99%