Ceramic Micro Heater Technology for Gas Sensors

Fabrication of microheater by laser micro cladding electronic paste

“…Microheaters have been widely investigated because of their extensive applications in gas sensors, flow rate sensors and other Microsystems [1][2][3]. Sensor properties are very dependent on the heater properties.…”

Fabrication, Performances and Aging of Flexible Gas Sensor Platforms

“…Silicon technology is energetically a little more efficient, around few tens of mW for 200 º C [27,28], but the fabrication process is extremely expensive and time consuming. An alternative can be the ceramic technology because it is cheaper, but in this case the power consumption increases excessively on the order of hundred times more [29,30], as well than on glass-based devices [31]. Therefore, the methodology here proposed can be considered like a good alternative to both technologies, reaching a low-consumption and low-cost sensor platform.…”

Fabrication of MEMS Platform for Sensors Applications by Laser Micro Engraving

“…These green tape sheets can be cut by laser or stamp and then the stack of these sheets can be co-fired to form rigid frame. The microhotplates based on LTCC were studied by several research groups from: Technical University of Wroclaw (Poland) reported by Teterycz et al (1998) and Kita et al (2000), University of Bayreuth (Germany) reported by Rettig and Moos (2004), National Institute for R&D in Microtechnologies (Bucharest, Romania) reported by Moldovan et al (2007), and others. LTCC ceramics is, obviously, very suitable material for the tooling and fabrication of all elements of microhotplate.…”