Abstract:The target of this work is the demonstration of advanced approaches able to provide rapid prototyping by using laser technology ceramic MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which can be used for the deposition of high working temperature gas sensing materials, for example, oxides of tin, gallium, zirconium and hafnium. As substrate ceramic material in work using alumina oxide
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.