Cathodoluminescence of cubic boron nitride films deposited by chemical vapor deposition

Abstract

Articles you may be interested inMorphology dependence of cathodoluminescence from cubic boron nitride films deposited by chemical vapor deposition J. Appl. Phys. 99, 124915 (2006); 10.1063/1.2205356 Ion implantation effects on the structure and nanomechanical properties of vapor deposited cubic boron nitride films J.Electron cyclotron wave resonance plasma assisted deposition of cubic boron nitride thin films Cubic boron nitride thin film deposition by unbalanced magnetron sputtering and dc pulsed substrate biasing

Formation of flower-like MgO crystal and its effect on the photoluminescence of Mg-cBN ceramics

“…5(b)). The vibration energy of the phonon participated was lower than the energies of the characteristic cBN optical phonons (131 meV for TO and 162 meV for LO mode [39]). However, it was equal to LO 3 phonon energy of hBN crystal lattice (LO 3 = 828 cm −1 (102.6 meV)) [40].…”

Deposition of thick cubic boron nitride films — Mechanisms and concepts

“…Moreover, the deposition of such thick films, even if the processes used are not suited for industrial applications, allowed the application of a wide variety of characterization methods which require a certain thickness and which cannot be applied to the standard c-BN films of a few hundred nm at best. Techniques such as Raman spectroscopy [10,26,12], cathodoluminescence [27], or advanced mechanical/tribological testing [15,23,25] to name but a few, have indeed revealed a vast amount of valuable informations on the properties of c-BN films, but also on the growth mechanisms.…”

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

“…Zhang et al 244 reported the cathodoluminescence characteristics of different c-BN samples. A, B, C were deposited by dc jet plasma CVD using a gas mixture of Ar-N 2 -BF 3 -H 2 with film thicknesses measured at about 10, 3, and 2 nm, respectively and sample D was deposited by microwave plasma CVD using a gas mixture of He-N 2 -BF 3 -H 2 of thickness about 3 nm.…”