Two types of polybenzoxazine films, PBa and PPd, that were prepared by the thermal cure of benzoxazines, Ba and Pd, were carbonized at temperature-controlled condition, and the effect of the chemical structure of the polybenzoxazines on carbonization was examined by comparing with the carbonization behavior of polyimide film. X-ray diffraction and X-ray photoelectron spectra measurements showed that the carbon films prepared by heat treatment of rigid polybenzoxazine, PPd, at 900 °C and 1000 °C were the most graphitized. Micrographitic structure was confirmed by transmission electron microscope observation for the carbonized films of PBa and PPd at 1000 °C.