2022
DOI: 10.1109/ted.2022.3151033
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Carbon Vacancy Assisted Contact Resistance Engineering in Graphene FETs

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Cited by 8 publications
(8 citation statements)
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“…Figure 7 reflects that the band structure has more trap states once the metal interacts with TMDs in the presence of the chalcogen vacancy. Thus, the chalcogen vacancy at the metal−TMD interface can play a key role in MIGS-assisted contact resistance engineering at the interface as demonstrated by Ansh et al 20 for TMDs and by Kumar et al 17 for graphene.…”
Section: ■ Results and Discussionmentioning
confidence: 98%
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“…Figure 7 reflects that the band structure has more trap states once the metal interacts with TMDs in the presence of the chalcogen vacancy. Thus, the chalcogen vacancy at the metal−TMD interface can play a key role in MIGS-assisted contact resistance engineering at the interface as demonstrated by Ansh et al 20 for TMDs and by Kumar et al 17 for graphene.…”
Section: ■ Results and Discussionmentioning
confidence: 98%
“…This chalcogen vacancy can perturb the chemistry of the materials with external agents . Interestingly, this vacancy can also be a contact engineering tool, as explored in other 2D materials like graphene . Thus, it is worth investigating the role of the chalcogen point vacancy in the interactions between metals and TMDs.…”
Section: Resultsmentioning
confidence: 99%
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“…According to the previous results, these vacancies increase the carrier transmission probabilities at the interface, resulting in a reduced contact resistance. 52 Thus, the Se vacancies generated in the rst RTA-annealed PtSe 2 lm (Fig. 2f) reduced the contact resistance; however, the Schottky barrier effect still existed because of the Pt and Ag electrodes, which were deposited onto the rst RTA-annealed PtSe 2 lm.…”
Section: Discussionmentioning
confidence: 99%