Carbon sputtering yield measurements at grazing incidence

Kolasinski, Robert; Polk, James E.; Goebel, Dan M.; Johnson, L. K.

doi:10.1016/j.apsusc.2007.09.082

Cited by 41 publications

(20 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Details of the sputtering process are of interest from both theoretical and applied points of view. In this contribution, our interest is in the role of sputtering in electric propulsion (EP) thrusters used for satellite and space exploration [2][3][4][5][6][7][8] . In these devices, sputter erosion places a fundamental limitation on lifetimes.…”

Section: Nomenclature Ymentioning

confidence: 99%

Differential Sputter Yields Of Boron Nitride, Quartz, and Kapton Due to Low Energy Xe+ Bombardment

Yalin¹,

Rubin²,

Domingue³

et al. 2007

43rd AIAA/ASME/SAE/ASEE Joint Propulsion Conference &Amp;amp; Exhibit

View full text Add to dashboard Cite

In this contribution we present results of differential sputter yield measurements of boron nitride, quartz, and kapton due to bombardment by xenon ions. The measurements are made using a sputtering diagnostic based on a quartz crystal microbalance (QCM). The QCM measurement allows full angular resolution, i.e. differential sputtering yield measurements are measured as a function of both polar angle and azimuthal angle. Measured profiles are presented for 100, 250, 350 and 500 eV Xe + bombardment at 0º, 15º, 30º and 45º angles of incidence. We fit the measured profiles with Modified Zhang expressions using two free parameters: the total sputter yield, Y, and characteristic energy E*. Total yields are calculated from the differential profiles and are compared with published values and weight loss values where possible. φ = azimuthal angle in the target plane from the plane containing the ion beam and target normal ρ = density of target material I.

show abstract

Section: Nomenclature Ymentioning

confidence: 99%

Differential Sputter Yields Of Boron Nitride, Quartz, and Kapton Due to Low Energy Xe+ Bombardment

Yalin¹,

Rubin²,

Domingue³

et al. 2007

43rd AIAA/ASME/SAE/ASEE Joint Propulsion Conference &Amp;amp; Exhibit

View full text Add to dashboard Cite

show abstract

“…Kolasinski et al determined the sputtering yield of carbon by measuring the removed mass with QCM at high angles of incidences for Xe + ion bombardment. [13] They discussed in detail the influence of distribution of the local angle of ion incidence. We will report on the AES depth profiling measurements, which were carried out on thin (about 10 nm each layers) bilayers using 1 keV Ar + ion bombardment in range of 70…”

Section: Introductionmentioning

confidence: 99%

Determination of the relative sputtering yield of carbon to tantalum by means of Auger electron spectroscopy depth profiling

Kotis

Menyhárd

Sulyok

et al. 2009

Surface & Interface Analysis

View full text Add to dashboard Cite

The relative sputtering yield of carbon with respect to tantalum was determined for 1 keV Ar + ion bombardment in the angular range of 70• -82 • (measured from surface normal) by means of Auger electron spectroscopy depth profiling of C/Ta and Ta/C bilayers. The ion bombardment-induced interface broadening was strongly different for the C/Ta and Ta/C, whereas the C/Ta interface was found to be rather sharp, the Ta/C interface was unusually broad. Still the relative sputtering yields (Y C /Y Ta ) derived from the Auger electron spectroscopy depth profiles of the two specimens agreed well. The relative sputtering yields obtained were different from those determined earlier on thick layers, calculated by simulation of SRIM2006 and by the fitting equation of Eckstein. The difference increases with increase of angle of incidence.

show abstract

“…However, experimental evidence indicates that the amount of sputtering cannot be neglected. 10,11) Understanding this discrepancy is an urgent problem in the development of the JIEDI tool for developing practical sputtering yield models for C/C. Kenmotsu et al have suggested that adsorption of xenon atoms at the carbon surface enhances the sputtering yield.…”

Section: Semi-empirical Formulamentioning

confidence: 99%

“…11,14,15) For the experiments, Tartz et al used a microbalance 14,15) and Kolasinski et al employed a quartz crystal microbalance (QCM).…”

Section: Carbon Sputtering Yieldmentioning

confidence: 99%

“…Large amounts of experimental data are available for the normal incidences of graphite, diamond, and pyrographite, [8][9][10][11][12][13][14][15] that can be used to derive some empirical formula by curve-fitting, and this approach is widely used in engineering applications. In contrast, only small amounts of experimental data are available to derive an empirical formula for the angular dependence of sputtering.…”

Section: Sputtering Yield Of Carbonmentioning

confidence: 99%

See 1 more Smart Citation

Sputtering Yield of Carbon-Carbon Composite Due to Xenon Ion Bombardment in Ion Engines

Nakano

Hosoda

Nishiyama

2015

Trans. Japan Soc. Aero. S Sci.

View full text Add to dashboard Cite

The angular and energy dependence of the sputtering yield of a carbon-carbon composite due to xenon ion bombardment was investigated. Instead of assuming surfaces to be flat, a simple carbon fiber distribution model was introduced to account for the carbon-carbon composite surface structure observed using a scanning electron microscope. Yamamura's semi-empirical sputtering formula, which accounted for 14% xenon adsorption, was used to calculate the sputtering yield of the carbon fiber surface. The proposed model provided fairly good estimates of the angular and energy dependence of the sputtering yield for the carbon-carbon composite. A comparative analysis of sputtering yield models demonstrated that the proposed model most accurately predicted both the accelerator and decelerator grid mass changes in the ®10 PM ion engine endurance test. In this paper, we present sputtering yield data over a range of xenon incidence energies from 0 to 2 keV and angles of incidence from 0 (normal incidence) to 90°.

show abstract

Carbon sputtering yield measurements at grazing incidence

Cited by 41 publications

References 21 publications

Differential Sputter Yields Of Boron Nitride, Quartz, and Kapton Due to Low Energy Xe+ Bombardment

Differential Sputter Yields Of Boron Nitride, Quartz, and Kapton Due to Low Energy Xe+ Bombardment

Determination of the relative sputtering yield of carbon to tantalum by means of Auger electron spectroscopy depth profiling

Sputtering Yield of Carbon-Carbon Composite Due to Xenon Ion Bombardment in Ion Engines

Contact Info

Product

Resources

About