Carbon nanotube microbolometers on suspended silicon nitride via vertical fabrication procedure

Fernandes, Gustavo E.; Kim, Jin Ho; Chin, Matthew L.; Dhar, Nibir K.; Xu, Jimmy

doi:10.1063/1.4879542

Cited by 10 publications

(2 citation statements)

References 13 publications

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“…Table 4 lists some of the most important results from 2006 to 2015, in which all device parameters were measured at room temperature. In terms of active materials, we can roughly categorize CNT-based bolometric IR detectors into three groups: i) SWCNT films, [54,82,83,98] ii) SWCNT-polymer composites, [84][85][86][95][96][97] and iii) MWCNT bundles or films. [87-90, 99, 100, 101] Except on some rare occasions, the typical response time of these devices is in the range of tens of milliseconds, and the typical dectectivity is ~10 6 -10 7 cm Hz 1/2 /W with working wavelengths extending from the near IR (~0.94 µm) to long-wavelength IR region (~20 µm).…”

Section: Cnt Bolometersmentioning

confidence: 99%

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Uncooled Carbon Nanotube Photodetectors

Léonard

Kono

2015

Advanced Optical Materials

154

166

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Photodetectors play key roles in many applications such as remote sensing, night vision, reconnaissance, medical imaging, thermal imaging, and chemical detection. Several properties such as performance, reliability, ease of integration, cost, weight, and form factor are all important in determining the attributes of photodetectors for particular applications. While a number of materials have been used over the past several decades to address photodetection needs across the electromagnetic spectrum, the advent of nanomaterials opens new possibilities for photodetectors. In particular, carbon-based nanomaterials such as carbon nanotubes (CNTs) and graphene possess unique properties that have recently been explored for photodetectors. Here, we review the status of the field, presenting a broad coverage of the different types of photodetectors that have been realized with CNTs, placing particular emphasis on the types of mechanisms that govern their operation. We present a comparative summary of the main performance metrics for such detectors, and an outlook for performance improvements.2

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Section: Cnt Bolometersmentioning

confidence: 99%

“…Recent work demonstrated a SWCNT film microbolometer array of 8 × 8 pixels, which were fabricated using a vertical process on a thin silicon nitride film. [83] This uncooled micorbolometer operated in the NIR and the edge of the midwave-IR band with a speed of 10 ms and detectivity of ~ 5.5 × 10 6 cm Hz 1/2 /W.…”

Section: Bolometers Based On Swcnt Filmsmentioning

confidence: 99%