1984
DOI: 10.1364/ao.23.000026
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Carbon isotopes laser separation by multiple-photon dissociation

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1985
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Cited by 14 publications
(2 citation statements)
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“…Hexafluoroethane (C 2 F 6 ) is widely used in the semiconductor fabrication industry as a dry-etching agent as well as in the enrichment of carbon-13 . C 2 F 6 is a potent greenhouse gas.…”
Section: Introductionmentioning
confidence: 99%
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“…Hexafluoroethane (C 2 F 6 ) is widely used in the semiconductor fabrication industry as a dry-etching agent as well as in the enrichment of carbon-13 . C 2 F 6 is a potent greenhouse gas.…”
Section: Introductionmentioning
confidence: 99%
“…11 Hexafluoroethane (C 2 F 6 ) is widely used in the semiconductor fabrication industry as a dry-etching agent 12 as well as in the enrichment of carbon-13. 13 C 2 F 6 is a potent greenhouse gas. It has an atmospheric lifetime greater than 2000 years 14 and a 100 year global warming potential (GWP) of 11 500 (compared to CO 2 , which has a GWP of 1).…”
Section: ■ Introductionmentioning
confidence: 99%