Carbon Interdigitated Array Nanoelectrodes for Electrochemical Applications

Heo, Jungwoo; Shim, Dae-Shick; Teixidor, Genis Turon; Oh, Seajin; Madou, M.; Shin, Heungjoo

doi:10.1149/1.3531952

Cited by 77 publications

(67 citation statements)

References 20 publications

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“…In 2005, structures with aspect ratios higher than 10 were reported by Wang et al [17], and since then, a variety of complex carbon microstructures have been derived from SU-8. The fabrication of high-aspect ratio structures [18,19], nano-electrodes [20], free-standing all-carbon micromolds [21,22], wires [23] and the integration of carbon electrodes in polymer devices for particle manipulation [24] are included in the latest achieved milestones. Here, I first present a number of possible optimization steps in a traditional SU-8 photolithography process that can lead to innovative carbon structures.…”

Section: Introductionmentioning

confidence: 99%

SU-8 Photolithography as a Toolbox for Carbon MEMS

Martínez-Duarte

2014

Micromachines

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Abstract:The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the versatility of the process. The shrinkage of SU-8 during carbonization is then detailed as one of the guidelines necessary to design carbon patterns. A couple of applications-(1) carbon-electrode dielectrophoresis for bioparticle manipulation; and (2) the use of carbon structures as micro-molds are also presented.

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Section: Introductionmentioning

confidence: 99%

SU-8 Photolithography as a Toolbox for Carbon MEMS

Martínez-Duarte

2014

Micromachines

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“…With high aspect ratio, the diffusion between the vertical walls of the electrodes increases and the diffusion above the electrode tops decreases. Therefore the diffusion flux increases and the redox cycling current is enhanced [25].…”

Section: The Cyclic Voltammetry Responses At Low and High Scanning Ratesmentioning

confidence: 99%

Fabrication of a 3D interdigitated double-coil microelectrode chip by MEMS technique

et al. 2012

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We have fabricated an interdigitated double-coil microelectrode chip for the determination of traces of phosphate by making use of a MEMS technique and enzyme immobilization technology. The chip is composed of two 3-dimensional strip microelectrodes which form a double coil microelectrode configuration with steep sidewalls and high aspect ratio. This novel configuration results in a high current response during amplification by redox cycling. The enzyme pyruvate oxidase was immobilized on the chip using gold nanoparticles as a support. Phosphate can be determined by using this chip with good sensitivity and linearity and in concentrations ranging from 0.5 μM to 7 μM.

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“…However, there still remains a strong need for a high-resolution, high-throughput patterning method, applicable to a wider variety of polymer precursors, to manufacture thinner wires for C-MEMS and C-NEMS. In addition, an improved throughput of the NFES will help in manufacturing new classes of well-defined polymer and carbon micro/nanostructures for advanced applications in electrochemical sensing, energy storage, and stem cell research 18,[40][41][42][43][44][45] .…”

Section: Introductionmentioning

confidence: 99%

Fabrication of patterned graphitized carbon wires using low voltage near-field electrospinning, pyrolysis, electrodeposition, and chemical vapor deposition

et al. 2020

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We herein report a high-resolution nanopatterning method using low voltage electromechanical spinning with a rotating collector to obtain aligned graphitized micro and nanowires for carbon nanomanufacturing. A small wire diameter and a small inter-wire spacing were obtained by controlling the electric field, the spinneret-to-collector distance, the pyrolysis parameters, the linear speed of the spinneret, the rotational speed of the collector. Using a simple scaling analysis, we show how the straightness and the diameter of the wires can be controlled by the electric field and the distance of the spinneret to the collector. A small inter-wire spacing, as predicted by a simple model, was achieved by simultaneously controlling the linear speed of the spinneret and the rotational speed of the collector. Rapid drying of the polymer nanowires enabled the facile fabrication of suspended wires over various structures. Patterned polyacrylonitrile wires were carbonized using standard stabilization and pyrolysis to obtain carbon nanowires. Suspended carbon nanowires with a diameter of <50 nm were obtained. We also established a method for making patterned, highly graphitized structures by using the aforementioned carbon wire structures as a template for chemical vapor deposition of graphite. This patterning technique offers high throughput for nano writing, which outperforms other existing nanopatterning techniques, making it a potential candidate for large-scale carbon nanomanufacturing.

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Carbon Interdigitated Array Nanoelectrodes for Electrochemical Applications

Cited by 77 publications

References 20 publications

SU-8 Photolithography as a Toolbox for Carbon MEMS

SU-8 Photolithography as a Toolbox for Carbon MEMS

Fabrication of a 3D interdigitated double-coil microelectrode chip by MEMS technique

Fabrication of patterned graphitized carbon wires using low voltage near-field electrospinning, pyrolysis, electrodeposition, and chemical vapor deposition

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