Capturing the Effects of Spatial Process Variations in Silicon Photonic Circuits

Xing, Yufei; Dong, Jiaxing; Khan, Umar; Bogaerts, Wim

doi:10.1021/acsphotonics.2c01194

Cited by 29 publications

(22 citation statements)

References 46 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…According to the experimental data presented in [ 35 ], the intra-wafer standard deviation of the waveguide width for the typical SOI fabrication process based on 248 nm photolithography is about 3.9 nm. In the commercially available state-of-the-art 193 nm immersion lithography and dry etch fabrication process, the intra-wafer waveguide width standard deviation can be as low as 2.5 nm [ 50 ]. However, according to [ 51 ], for different wafers, the standard deviation of waveguide width can reach 6.4 nm.…”

Section: Discussionmentioning

confidence: 99%

Design and Modeling of a Fully Integrated Microring-Based Photonic Sensing System for Liquid Refractometry

Voronkov

Zakoyan

Ivanov

et al. 2022

Sensors

View full text Add to dashboard Cite

The design of a refractometric sensing system for liquids analysis with a sensor and the scheme for its intensity interrogation combined on a single photonic integrated circuit (PIC) is proposed. A racetrack microring resonator with a channel for the analyzed liquid formed on the top is used as a sensor, and another microring resonator with a lower Q-factor is utilized to detect the change in the resonant wavelength of the sensor. As a measurement result, the optical power at its drop port is detected in comparison with the sum of the powers at the through and drop ports. Simulations showed the possibility of registering a change in the analyte refractive index with a sensitivity of 110 nm per refractive index unit. The proposed scheme was analyzed with a broadband source, as well as a source based on an optoelectronic oscillator using an optical phase modulator. The second case showed the fundamental possibility of implementing an intensity interrogator on a PIC using an external typical single-mode laser as a source. Meanwhile, additional simulations demonstrated an increased system sensitivity compared to the conventional interrogation scheme with a broadband or tunable light source. The proposed approach provides the opportunity to increase the integration level of a sensing device, significantly reducing its cost, power consumption, and dimensions.

show abstract

Section: Discussionmentioning

confidence: 99%

Design and Modeling of a Fully Integrated Microring-Based Photonic Sensing System for Liquid Refractometry

Voronkov

Zakoyan

Ivanov

et al. 2022

Sensors

View full text Add to dashboard Cite

show abstract

“…One of the major challenges in large-scale photonic circuits is the sensitivity of on-chip waveguides to small variations in the fabricated geometry. 48 Even nanometer-scale deviations of the waveguide width and thickness can give rise to unacceptable behavior of the circuit, and this problem becomes more prominent as the circuits become larger. Programmable circuits can actually help in addressing this because the built-in electro-optic actuators can be used to compensate for many of the fabrication variations.…”

Section: Variability Imperfections and Lossesmentioning

confidence: 99%

Scaling programmable silicon photonics circuits

Bogaerts

Nagarjun

Iseghem

et al. 2023

Silicon Photonics XVIII

Self Cite

View full text Add to dashboard Cite

We give an overview the progress of our work in silicon photonic programmable circuits, covering the technology stack from the photonic chip over the driver electronics, packaging technologies all the way to the software layers. On the photonic side, we show our recent results in large-scale silicon photonic circuits with different tuning technologies, including heaters, MEMS and liquid crystals, and their respective electronic driving schemes.We look into the scaling potential of these different technologies as the number of tunable elements in a circuit increases. Finally, we elaborate on the software routines for routing and filter synthesis to enable the photonic programmer.

show abstract

“…3 and pessimistically adding it to the expected FSR variation, we expect a nominal 𝜆 ag of 133.33 GHz to accommodate a yield of 6𝜎. This yield estimate is calculated assuming that resonators within the same chip will be highly correlated in their FSR performance [23,27].…”

Section: Aggressor Spacing Reduction Due To Fsr Errormentioning

confidence: 99%

Scaling Comb-Driven Resonator-Based DWDM Silicon Photonic Links to Multi-Tb/s in the Multi-FSR Regime

James¹,

Novick²,

Rizzo³

et al. 2023

Preprint

View full text Add to dashboard Cite

The use of chip-based micro-resonator Kerr frequency combs in conjunction with dense wavelength-division multiplexing (DWDM) enables massively parallel intensity-modulated direct-detection (IM-DD) data transmission with low energy consumption. Resonator-based modulators and filters used in such systems can limit the number of usable wavelength channels due to practical constraints on the maximum achievable free spectral range (FSR). In this work, we introduce the design of multi-Tb/s comb-driven resonator-based silicon photonic links by leveraging the multi-FSR regime. We demonstrate the viability of the link architecture with yield estimates that are supported by extensive wafer-scale measurements of 704 micro-resonators fabricated in a commercial complementary metal–oxide–semiconductor (CMOS) foundry. We show that a 2.80 Tb/s link is realizable with a ≥ 6σ yield (~99.999%), and aggregate bandwidths of 3.76 Tb/s and 4.72 Tb/s are possible if yield targets are relaxed (3σ and 1σ respectively). All designs represent a 1.94—3.28× boost to aggregate link bandwidth while maintaining BER ≤ 10−10 performance, with a theoretical bandwidth of 10.51 Tb/s being possible for sufficiently robust resonators. High-speed BER measurements informed co-optimization of data rate and aggressor spacing (λag), limiting any additional loss-based power penalties to off-resonance insertion loss (IL) and routing loss. This work demonstrates that, through the multi-FSR regime, there is a clear path toward Kerr comb-driven ultra-broadband, high bandwidth silicon photonic links that can support next-generation data centers and high performance computers.

show abstract

Capturing the Effects of Spatial Process Variations in Silicon Photonic Circuits

Cited by 29 publications

References 46 publications

Design and Modeling of a Fully Integrated Microring-Based Photonic Sensing System for Liquid Refractometry

Design and Modeling of a Fully Integrated Microring-Based Photonic Sensing System for Liquid Refractometry

Scaling programmable silicon photonics circuits

Scaling Comb-Driven Resonator-Based DWDM Silicon Photonic Links to Multi-Tb/s in the Multi-FSR Regime

Contact Info

Product

Resources

About