2012
DOI: 10.1088/0963-0252/21/4/045008
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Capacitively coupled radio-frequency discharges in nitrogen at low pressures

Abstract: This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56 MHz frequency, 0.1-1 mbar pressures and 2-30 W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, include electrical and optical emission spectroscopy (OES) measurements. Electrical measurements give the rf-applied and the direct-current-self-bias voltages, the effective power coupled to the plasma and the aver… Show more

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Cited by 40 publications
(68 citation statements)
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“…This lower contribution of large ions in our experiment compared to Titan's ionosphere might also be due to surface recombination of radicals occurring on the walls of the chamber, limiting their lifetime and further growth chemistry. Modeling work by Alves et al (2012) did indeed previously show an efficient wall loss process of N radicals in the case of a pure N 2 discharge.…”
Section: Comparisons With the Inms T40 Measurements And Group Patternsmentioning
confidence: 74%
“…This lower contribution of large ions in our experiment compared to Titan's ionosphere might also be due to surface recombination of radicals occurring on the walls of the chamber, limiting their lifetime and further growth chemistry. Modeling work by Alves et al (2012) did indeed previously show an efficient wall loss process of N radicals in the case of a pure N 2 discharge.…”
Section: Comparisons With the Inms T40 Measurements And Group Patternsmentioning
confidence: 74%
“…In plasmas, N 2 dissociation mostly occurs via (i) electron impact at electron energies above the dissociation threshold of N 2 (9.8 eV) and (ii) heavy particles collisions (Fridman, 2008, Alves et al, 2012. As electron energy of impacting electrons is continuous and not quantified as for photons, several excited states of atoms and molecules can be reached by electron impact in plasmas.…”
Section: Discussion and Implications 41 Origin Of The Nitrogen Isotomentioning
confidence: 99%
“…This is in agreement with the modeling of the electron energy distribution functions (EEDF) in our plasma discharge. Indeed, the calculated EEDF realized in pure nitrogen presents a maximum at 2 eV and a relatively populated tail for electron energy above 4 eV (Alves et al 2012). Thus, the plasma produces electrons with enough energy to produce the above Reactions (R1).…”
Section: Water Formation and Quantificationmentioning
confidence: 96%