Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis

Abstract

Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 µ g/ √ Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/ o c and shock survivability of more than 1000 g.

Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation

“…To get high sensitivity, the interferometer to be biased about operating point with a non zero response slope 8,9 P (∆φ a )…”