Calorimetric biosensors with integrated microfluidic channels

Zhang, Yuyan; Tadigadapa, Srinivas

doi:10.1016/j.bios.2004.01.009

Cited by 188 publications

(116 citation statements)

References 28 publications

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“…The thin film encapsulating structures, in contrast to other bulky closed chamber configuration l-calorimeters, which are of the order of millimeters in thickness. 7,11,12 As a result, the thermal mass of the fabricated reaction chamber is about 3 orders of magnitude smaller compared to the conventional bulky chambers, directly resulting in a corresponding increase in temperature detection sensitivity. In this device, the heater and the temperature sensor are integrated on different sides of the reaction chamber such that the sample can be placed between the heater and the sensor.…”

Section: Introductionmentioning

confidence: 99%

“…7 Previously reported methods for fabricating closed reaction chambers for l-calorimeters have used soft lithography techniques, isotropic etching of micro cavities, 12 off-chip wafer bonding processes 10 or made using polymer thin films. 7 Effective use of calorimetric techniques requires quasi adiabatic conditions in the l-calorimeter, which requires good thermal isolation of the reaction chamber from the ambient and substrate.…”

Section: A Reaction Chamber Designmentioning

confidence: 99%

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A novel on-chip three-dimensional micromachined calorimeter with fully enclosed and suspended thin-film chamber for thermal characterization of liquid samples

et al. 2014

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A microfabricated calorimeter (l-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and increase the sensitivity of system. The l-calorimeter has been designed to perform DC and AC calorimetry, thermal wave analysis, and differential scanning calorimetry. The l-calorimeter fabricated with an integrated heater and a temperature sensor on opposite sides of the reaction chamber allows to perform thermal diffusivity and specific heat measurements on liquid samples with same device. Measurement results for diffusivity and heat capacitance using time delay method and thermal wave analysis are presented. V C 2014 AIP Publishing LLC. [http://dx

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Section: Introductionmentioning

confidence: 99%

Section: A Reaction Chamber Designmentioning

confidence: 99%

A novel on-chip three-dimensional micromachined calorimeter with fully enclosed and suspended thin-film chamber for thermal characterization of liquid samples

et al. 2014

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“…Two types of the suspended membrane material are the silicon compound such as SiO 2 , polysilicon, Si 3 N 4 [43][44][45] and polymers [46][47][48]. Among the silicon compounds, Si 3 N 4 is the best for its total inertness and can be easily manipulated.…”

Section: Thermal Insulation Systemmentioning

confidence: 99%

Review of MEMS differential scanning calorimetry for biomolecular study

Wang

et al. 2017

Front. Mech. Eng.

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Differential scanning calorimetry (DSC) is one of the few techniques that allow direct determination of enthalpy values for binding reactions and conformational transitions in biomolecules. It provides the thermodynamics information of the biomolecules which consists of Gibbs free energy, enthalpy and entropy in a straightforward manner that enables deep understanding of the structure function relationship in biomolecules such as the folding/unfolding of protein and DNA, and ligand bindings. This review provides an up to date overview of the applications of DSC in biomolecular study such as the bovine serum albumin denaturation study, the relationship between the melting point of lysozyme and the scanning rate. We also introduce the recent advances of the development of micro-electro-mechanic-system (MEMS) based DSCs.

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“…In previous studies, diaphragm structures, fl oating membrane structures or elevated structures of thermoelectric sensing layers were used to minimize parasitic heat transfer. (12,13) However, the use of these structures has downsides, such as the yield reduction of the device due to a complicated bulk-micromachining fabrication process. In particular, elevated thermoelectric gas sensors are fragile to agitations induced by fl uctuations in external gas fl ow and by mechanical shocks.…”

Section: Introductionmentioning

confidence: 99%

Detection of Hydrogen and NOx Gases Based on a Thermoelectric Gas Sensor with an Embedded Tin Oxide Catalyst

Yoon

Lee

Kim³

2010

Sensors and Materials

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In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivity layer, SU-8 in this case, which led to the reduction in the rate of parasitic heat transfer to the substrate. In order to verify the thermal characteristic of the fabricated sensor, the intensity of output signals depending on the temperature differences between the hot and cold junctions was measured. The sensor response to the temperature change was 4.61 V/W. Hydrogen and NO x gases were detected by the proposed sensor. The change in output signal intensity depending on hydrogen gas concentration was 1.06×10 −1 µV/ppm, and the change in output signal intensity depending on NO x gas concentration was 1.50×10 −1 µV/ppm.

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Calorimetric biosensors with integrated microfluidic channels

Cited by 188 publications

References 28 publications

A novel on-chip three-dimensional micromachined calorimeter with fully enclosed and suspended thin-film chamber for thermal characterization of liquid samples

A novel on-chip three-dimensional micromachined calorimeter with fully enclosed and suspended thin-film chamber for thermal characterization of liquid samples

Review of MEMS differential scanning calorimetry for biomolecular study

Detection of Hydrogen and NOx Gases Based on a Thermoelectric Gas Sensor with an Embedded Tin Oxide Catalyst

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