Abstract:In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivit… Show more
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