2004
DOI: 10.1016/j.apsusc.2004.03.113
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C60 molecular depth profiling of a model polymer

Abstract: The bombardment of a 26 nm poly(methyl methacrylate) (PMMA) film has been studied as a model for depth profiling of polymeric samples using a newly developed C 60 þ ion source. Experiments were conducted on a ToF-SIMS instrument equipped with C 60 þ and Ga þ ion sources. A focused dc C 60 þ ion beam was used to etch through the polymer sample at specified time intervals. Subsequent spectra were recorded after each individual etching cycle using both C 60 þ 20 keV and Ga þ 15 keV ion beams at field-of-views sma… Show more

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Cited by 67 publications
(84 citation statements)
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“…For example, these sources can be focused onto the sample with a probe size about 1 micron, allowing greatly improved molecule-specific imaging experiments. The high secondary ion yield associated with the cluster/solid interaction also allows for molecular depth profiling studies without the accompanying damage accumulation normally associated with atomic bombardment [7][8][9][10][11][12][13][14][15][16][17].…”
mentioning
confidence: 99%
“…For example, these sources can be focused onto the sample with a probe size about 1 micron, allowing greatly improved molecule-specific imaging experiments. The high secondary ion yield associated with the cluster/solid interaction also allows for molecular depth profiling studies without the accompanying damage accumulation normally associated with atomic bombardment [7][8][9][10][11][12][13][14][15][16][17].…”
mentioning
confidence: 99%
“…There has been a recent flurry of interest in utilizing energetic buckminsterfullerene (C 60 ) molecules [1][2][3][4][5][6][7][8][9][10][11][12] for surface characterization in time-of-flight secondary ion mass spectrometry (SIMS) experiments. 13 For these experiments, C 60 + ions are accelerated to between 10 and 20 keV, pulsed, and focused onto a target causing desorption of atoms and molecules from the near-surface region.…”
Section: Introductionmentioning
confidence: 99%
“…S econdary ion mass spectrometry (SIMS) has become a powerful analysis tool for depth profiling or chemical mapping of organic and biological systems [1][2][3][4][5]. One such application has been onedimensional depth profiling of polymer films and multilayers, which has provided a significant driving force for growth in experimental and theoretical polymer physics over the past 20 years [6].…”
mentioning
confidence: 99%