C016 An ultra-sensitive angle sensor based on laser autocollimation for stage motion measurement

Murata, Dai; Tan, Siew Leng; Shimizu, Yuki; Ito, So; Gao, Wei

doi:10.1299/jsmelem.2013.7.377

Cited by 1 publication

(2 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The normalized output I, which is referred to as the sensor output in this paper, can be written as follows. (Murata et al, 2013):…”

Section: Measurement Principle Of Angular Displacementmentioning

confidence: 99%

“…Then the SPD1 detects the change in the total intensity introduced by ∆d. On the assumption that ∆θ is small, the sensor output can be written as follows (Murata et al, 2013): Tamada, Kudo, Chen, Shimizu and Gao, Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol.10, No.5 (2016) Here 2w corresponds to the diameter of the light spot focused on the SPDs. From Eqs.…”

Section: Measurement Principle Of Angular Displacementmentioning

confidence: 99%

See 1 more Smart Citation

Determination of the zero-position for an optical angle sensor

Tamada

Kudo

Chen

et al. 2016

JAMDSM

Self Cite

View full text Add to dashboard Cite

This paper proposes a new optical angle sensor, in which a mode-locked femtosecond laser referred to as the optical frequency comb is employed as the light source for the sensor. By using the optical frequency comb, whose carrier frequency is well stabilized by using an external frequency standard with the uncertainty of 10-11 , both the sensor stability and the sensor sensitivity are expected to be improved. In this paper, the angle error caused by the frequency fluctuation of the laser beam is considered in the case of both the mode-locked femtosecond laser and a laser diode, which is a conventional light source for the optical angle sensor. A prototype optical sensor head with the mode-locked femtosecond laser is then fabricated for the angle sensor. Since the light wavelength of the mode-locked femtosecond laser used in this paper is out of the visible range, an alignment method based on laser autocollimation with a retroreflector is introduced to determine the zero-position for the angle sensor. This method is also effective in suppressing the influence of the alignment error such as a cosine error. Some basic experiments are carried out to verify the feasibility of the developed angle sensor with the optical frequency comb.

show abstract

“…The normalized output I, which is referred to as the sensor output in this paper, can be written as follows. (Murata et al, 2013):…”

Section: Measurement Principle Of Angular Displacementmentioning

confidence: 99%

Section: Measurement Principle Of Angular Displacementmentioning

confidence: 99%