Professor Tan Ming Jen, for offering me the opportunity to work with him, for giving me the freedom to explore the present research field, for recommending me the people from different scientific areas, and, most of all, for constantly understanding and encouraging me through the years. Deep gratitude also goes to Professor Liew Kim Meow from the City University of Hong Kong, who has provided me the opportunity to visit his group and the guidance in the computational part of the thesis. I gratefully thank Associate Professor Christopher Shearwood for his help in showing me the facilities of the clean room and his advice on part of my thesis work. Great thanks also go to Associate Professor Sridhar Idapalapati and Assistant Professor Wong Chee How for their useful discussion on my initial work. I am thankful for the collaboration with Ms. Liu Yuchan from the Singapore Institute of Manufacturing Technology, who has provided me the access to the high-temperature nanoindentation instrument. Many thanks go to the technical staff of the School who have lent their hands in technical supports, especially Mr.