Buckling of thermally-grown SiO<sub>2</sub>thin films

Wilmsen, C. W.; Thompson, Earl A.; Meissner, Greg

doi:10.1109/t-ed.1972.17381

Cited by 22 publications

(13 citation statements)

References 1 publication

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“…This can be easily confirmed by substituting these relationships into the governing equation (5). Therefore, these relationships are just the approximations of the real angle-position relationship.…”

Section: Discussion Of Resultsmentioning

confidence: 67%

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Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

2005

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In this work, an analytical relationship is derived for a doubly-clamped microbeam when it buckles after release from the substrate. In terms of the relationship, compressive residual stress in the doubly-clamped microbeam can be determined according to its buckled shape, allowing one to find the compressive residual stress directly without much experimental effort. This relationship has been used to determine compressive residual stresses in four types of doublyclamped SiO 2 microbeams. In addition, four methods have been applied to find the elongations of these SiO 2 microbeams, and the corresponding results are compared. Finally, the residual stresses in doubly-clamped SiO 2 microbeams predicted according to the derived relationship are compared with those found in SiO 2 microcantilevers, and the results have a good match.

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Section: Discussion Of Resultsmentioning

confidence: 67%

“…Arrays of clamped-clamped (i.e., doubly-clamped) microbeams of different lengths have been used to determine residual stresses in polysilicon films [1][2][3] and thermal SiO 2 4,5 . Since fabrication processes that microbeams experience are similar to those for thin films, the microbeams should have residual stress as well.…”

Section: Introductionmentioning

confidence: 99%

Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

2005

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“…BOX layer has built-in compressive stresses that originate during the high-temperature growth process, due to the difference in thermal expansion coefficient between Si and SiO 2 [13]. Releasing such a compressively-stressed beam will partially relief the stresses by beam elongation, as shown in Fig.…”

Section: Tensile Strain By Free-standing Sio 2 Beamsmentioning

confidence: 99%

“…Releasing such a compressively-stressed beam will partially relief the stresses by beam elongation, as shown in Fig. 5 (a) and (b), while residual stresses work on deflecting the beam [13], [14]. Consequently, upward bending, for example, will cause the upper side of the beam to be tensile-strained, while the bottom side gets compressed [14], as shown in Fig.…”

Section: Tensile Strain By Free-standing Sio 2 Beamsmentioning

confidence: 99%

Fabrication of Ge micro-disks on free-standing SiO2 beams for monolithic light emission

Al-Attili

Husain

Gardès

et al. 2015

2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO)

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“…This results in a biaxial compressive stress being applied to the SiO 2 layer (Fig 1). It is this compressive stress which causes the membrane to buckle out of plane [3], [4].…”

Section: Introductionmentioning

confidence: 99%

Tunable pressure sensing applications of a MEMS buckled membrane

Lake

Coutu

2015

2015 National Aerospace and Electronics Conference (NAECON)

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Buckled membranes are commonly used in microelectromechanical systems (MEMS) structures. One application of a microfabricated membrane is pressure sensing. A differential pressure across the membrane causes deflection, up or down, which can be measured and related to a specific pressure change. Recent work has demonstrated that the deflection and stiffness of these membranes can be tuned through localized joule heating. This opens up a wider range of possible applications of these membranes. In typical pressure sensor design, the mechanical properties of the membrane are constant resulting in a limited range of response to pressure. By tuning the stiffness of the membrane, its pressure response is varied providing a wider range of application for the pressure sensor. A 1.5mm by 1.5mm square membrane demonstrated a decrease in pressure sensitivity from 6μm/psi to 0.2μm/psi over a range of 0 to 15 volts applied to an electrothermal heater on top of the membrane.

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Buckling of thermally-grown SiO₂thin films

Cited by 22 publications

References 1 publication

Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

Fabrication of Ge micro-disks on free-standing SiO2 beams for monolithic light emission

Tunable pressure sensing applications of a MEMS buckled membrane

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Buckling of thermally-grown SiO2thin films

Cited by 22 publications

References 1 publication

Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

Fabrication of Ge micro-disks on free-standing SiO2 beams for monolithic light emission

Tunable pressure sensing applications of a MEMS buckled membrane

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Buckling of thermally-grown SiO₂thin films