2015
DOI: 10.1039/c5nr02820e
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Buckled diamond-like carbon nanomechanical resonators

Abstract: We have developed capacitively-transduced nanomechanical resonators using sp(2)-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of adva… Show more

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Cited by 12 publications
(16 citation statements)
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“…These factors, which sum up to clamping losses, contribute to the low Q m measured for devices A and B. Furthermore, both devices suffer from imperfect, non-uniform clamping boundaries 45 . Table 2 lists other NMR-related quantities that are derived from Fig.…”
Section: Calibration Of Motional Amplitude In the Frequency And Spatial Domainmentioning
confidence: 99%
“…These factors, which sum up to clamping losses, contribute to the low Q m measured for devices A and B. Furthermore, both devices suffer from imperfect, non-uniform clamping boundaries 45 . Table 2 lists other NMR-related quantities that are derived from Fig.…”
Section: Calibration Of Motional Amplitude In the Frequency And Spatial Domainmentioning
confidence: 99%
“…Even though the graphene has a thickness of one atom, the graphene membranes are quantitatively good described by the theory of elasticity [39][40][41][42] . This allows us, on one hand, to obtain analytical expressions for the buckled membranes [43][44][45] and, on the other hand, perform a comparison with MD simulations.…”
Section: Theory Of Elasticitymentioning
confidence: 99%
“…4 With amorphous diamond-like carbon another modification of carbon was used for resonator fabrication, recently. 5 Also black phosphorus 6 and transition metal dichalcogenides, such as single 7 or multilayer 8 MoS 2 as well as TaO 2 , 9 were integrated as functional materials. Zhang et al reported on resonators fabricated from carbon nanomembranes obtained by self-assembly and subsequent interlinkage of organic molecules.…”
Section: Introductionmentioning
confidence: 99%