Fabry–Perot interferometric calibration of van der Waals material-based nanomechanical resonators

Aguila, Myrron Albert Callera; Esmenda, Joshoua Condicion; Wang, Jyh-Yang; Lee, Teik-Hui; Yang, Chih-Chyau; Lin, Kung‐Hsuan; Chang‐Liao, Kuei‐Shu; Kafanov, Sergey; Pashkin, Yu. A.; Chen, Chii-Dong

doi:10.1039/d1na00794g

Cited by 3 publications

(1 citation statement)

References 54 publications

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“…The extracted values of Q n and Q h are also comparable to values of previously studied resonators made by exfoliation and CVD [2,6,21,24], as illustrated in figure 4(a). To gain insight into the damping, we plot Q h versus n 0 for heterostructure resonators and Q n versus E n for NbS 2 resonators, respectively, as plotted in figures 3(d) and (e).…”

Section: Resultssupporting

confidence: 85%

Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials

Liu,

Basuvalingam,

Lodha

et al. 2023

2D Mater.

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Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD nanomechanical resonators consisting of a graphene/MoS2 heterostructure. Using AFM indentation and optothermal drive, we measure their mechanical properties including Young’s modulus, resonance frequency and quality factor, showing a lower energy dissipation compared to their exfoliated counterparts. We also demonstrate the fabrication of nanomechanical resonators by exfoliating an ALD grown NbS2 layer. This study exemplifies the potential of ALD techniques to produce high-quality suspended nanomechanical membranes, providing a promising route towards high-volume fabrication of future multilayer nanodevices and nanoelectromechanical systems.

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Section: Resultssupporting

confidence: 85%

Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials

Liu,

Basuvalingam,

Lodha

et al. 2023

2D Mater.

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Optoelectrical Nanomechanical Resonators Made from Multilayered Two-Dimensional Materials

Esmenda

Aguila

Wang

et al. 2022

ACS Appl. Nano Mater.

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Studies involving nanomechanical motion have evolved from the detection and understanding of its fundamental aspects to its promising practical utility as an integral component of hybrid systems. The nanomechanical resonators' indispensable role as transducers between optical and microwave fields in hybrid systems, such as quantum communications interfaces, have elevated their importance in recent years. It is therefore crucial to determine which among the family of nanomechanical resonators is more suitable for this role. Most of the studies revolve around nanomechanical resonators of ultrathin structures because of their inherently large mechanical amplitude due to their very low mass. Here, we argue that the underutilized nanomechanical resonators made from multilayered two-dimensional (2D) materials are the better fit for this role because of their comparable electrostatic tunability and potential for larger optomechanical responsivity. To show this, we first demonstrate the electrostatic tunability of mechanical modes of a multilayered nanomechanical resonator made from graphite. We also show that the optimal values of optomechanical responsivities are obtained for multilayered devices, particularly when the Fabry−Perot gap is close to half the detection wavelength. Finally, by using the multilayered model and comparing this device with the reported ones, we find that the electrostatic tunability of devices of intermediate thickness is not significantly lower than that of ultrathin ones. Together with the practicality in terms of fabrication ease and design predictability, we contend that multilayered 2D nanomechanical resonators are the optimal choice for the electromagnetic interface in integrated quantum systems.

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Photothermal Responsivity of van der Waals Material-Based Nanomechanical Resonators

et al. 2022

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Nanomechanical resonators made from van der Waals materials (vdW NMRs) provide a new tool for sensing absorbed laser power. The photothermal response of vdW NMRs, quantified from the resonant frequency shifts induced by optical absorption, is enhanced when incorporated in a Fabry–Pérot (FP) interferometer. Along with the enhancement comes the dependence of the photothermal response on NMR displacement, which lacks investigation. Here, we address the knowledge gap by studying electromotively driven niobium diselenide drumheads fabricated on highly reflective substrates. We use a FP-mediated absorptive heating model to explain the measured variations of the photothermal response. The model predicts a higher magnitude and tuning range of photothermal responses on few-layer and monolayer NbSe2 drumheads, which outperform other clamped vdW drum-type NMRs at a laser wavelength of 532 nm. Further analysis of the model shows that both the magnitude and tuning range of NbSe2 drumheads scale with thickness, establishing a displacement-based framework for building bolometers using FP-mediated vdW NMRs.

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Fabry–Perot interferometric calibration of van der Waals material-based nanomechanical resonators

Abstract: One of the challenges in integrating nanomechanical resonators made from van der Waals materials in optoelectromechanical technologies is characterizing their dynamic properties from vibrational displacement. Multiple calibration schemes using optical...

Cited by 3 publications

References 54 publications

Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials

Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials

Optoelectrical Nanomechanical Resonators Made from Multilayered Two-Dimensional Materials

Photothermal Responsivity of van der Waals Material-Based Nanomechanical Resonators

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