2015
DOI: 10.1021/acsami.5b06891
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Breakdown and Protection of ALD Moisture Barrier Thin Films

Abstract: The water vapor barrier properties of low-temperature atomic layer deposited (ALD) AlOx thin-films are observed to be unstable if exposed directly to high or even ambient relative humidities. Upon exposure to humid atmospheres, their apparent barrier breaks down and their water vapor transmission rates (WVTR), measured by electrical calcium tests, deteriorate by several orders of magnitude. These changes are accompanied by surface roughening beyond the original thickness, observed by atomic force microscopy. X… Show more

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Cited by 48 publications
(39 citation statements)
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“…To further demonstrate the fully flexible OPVs including light trapping elements, the device is protected by a 20 nm flexible AlO x layer at a water vapor transmission rate (WVTR) of 2 Â 10 À5 g/m 2 day. 28 Degradation of OPVs with this encapsulation was previously investigated, and AlO x layer still showed similar WVTR value without cracking after 300 bending cycles with the bending radius of 15 mm. 31 To check the stability of the solar cell on the PET substrates, a bending test is performed in the ambient condition.…”
mentioning
confidence: 54%
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“…To further demonstrate the fully flexible OPVs including light trapping elements, the device is protected by a 20 nm flexible AlO x layer at a water vapor transmission rate (WVTR) of 2 Â 10 À5 g/m 2 day. 28 Degradation of OPVs with this encapsulation was previously investigated, and AlO x layer still showed similar WVTR value without cracking after 300 bending cycles with the bending radius of 15 mm. 31 To check the stability of the solar cell on the PET substrates, a bending test is performed in the ambient condition.…”
mentioning
confidence: 54%
“…For the top encapsulation, an equivalent thin-film is deposited on 125 lm planarised Teonex PEN (Dupont Teijin Films Ltd., UK). In a glovebox, this barrier film is directly laminated onto the OPV devices using a special moisture barrier adhesive film (tesa SE, Germany), 28 which contains a latent getter against lateral oxygen and water diffusion. Current voltage curves are acquired under simulated AM 1.5G sunlight (16S-150 V.3, Solar Light Co., USA) using a Keithley 2400 source measuring unit (SMU).…”
mentioning
confidence: 99%
“…Details are described elsewhere. [ 38 ] The ALD deposition takes place either on the planarized Teonex PEN (pPEN, DupontTeijin, Japan) or directly on top of the solar cell cathode. Solar cells are prepared according to the following procedure: First, the PEDOT:PSS "P VP AI 4083" (Heraeus Clevios, Germany) is spin-coated as delivered with 2000 rpm (NOA63/NW35) or 4000 rpm (ITO), heated out at 120 °C for 15 min in air and overnight at 80 °C in an N 2 -fi lled glovebox.…”
Section: Methodsmentioning
confidence: 99%
“…The AlO x layer exhibits water vapor transmission rates down to 3 × 10 −5 g m −2 d −1 , measured at 38 °C and 90% relative humidity (RH). [ 38 ] Current Table 1 .…”
Section: Doi: 101002/aenm201502432mentioning
confidence: 99%
“…This step is necessary to prevent potential barrier corrosion. 9,10 Aging and WVTR measurements are done in a self-built setup containing thermal insulation boxes with heating resistors in a feedback control system for constant temperature adjustment, silica gel filled plastic boxes to keep the background humidity low, custom circuit boards to connect the samples to a Keithley 2400 source measuring unit (Keithley Instruments, OH, USA), custom-made switching circuits to individually connect samples, and a PC running a self-written measurement software. Each sample is connected to a vial of saturated salt solution, above which a constant relative humidity will arise.…”
mentioning
confidence: 99%