2022
DOI: 10.1016/j.mssp.2022.106802
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Bonding strength enhancement of low temperature sintered SiC power module by femtosecond laser induced micro/nanostructures

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Cited by 10 publications
(1 citation statement)
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“…Femtosecond laser processing technology has proven to be an effective solution for fabricating ASS. It enables the manufacturing of arbitrary structures with high-precision controllability, maskless and one-step molding. Meanwhile, its negligible thermal effects and designability of micro/nanostructure dimensions are very beneficial for the design and post-production of ASS array surfaces. , The superiority of this method has been proven in pioneer works concerning the processing of gallium arsenide, sapphire, etc. ,, For example, Bushunov et al used the femtosecond laser Gaussian beam to fabricate microhole arrays on gallium arsenide surfaces, achieving an average transmittance of 94% (7–11 μm) . The ASSs fabricated by this method have poor morphology and poor structural consistency due to the manufacturing accuracy limitation of Gaussian beams.…”
Section: Introductionmentioning
confidence: 99%
“…Femtosecond laser processing technology has proven to be an effective solution for fabricating ASS. It enables the manufacturing of arbitrary structures with high-precision controllability, maskless and one-step molding. Meanwhile, its negligible thermal effects and designability of micro/nanostructure dimensions are very beneficial for the design and post-production of ASS array surfaces. , The superiority of this method has been proven in pioneer works concerning the processing of gallium arsenide, sapphire, etc. ,, For example, Bushunov et al used the femtosecond laser Gaussian beam to fabricate microhole arrays on gallium arsenide surfaces, achieving an average transmittance of 94% (7–11 μm) . The ASSs fabricated by this method have poor morphology and poor structural consistency due to the manufacturing accuracy limitation of Gaussian beams.…”
Section: Introductionmentioning
confidence: 99%