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Mendes, R. G.; Araújo, E. B.; Klein, H.; Eiras, J. A.

doi:10.1023/a:1006649702683

Cited by 7 publications

(7 citation statements)

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“…SBN thin films have been prepared by several techniques like sol-gel processing 8 , pulsed laser deposition 9 and metalorganic chemical vapor deposition (MOCVD) 10 . Recently, it has been proposed to prepare SBN thin films by a chemical method based on a polymeric resin containing metallic ions 11 .…”

Section: Introductionmentioning

confidence: 99%

Structural characterization and ferroelectric properties of strontium barium niobate (Sr xBa1-xNb2O6) thin films

2001

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Strontium barium niobate (SBN) thin films of good quality were deposited on Pt/Ti/SiO2/Si substrate using a polymeric resin containing metallic ions. Films were crystallized at different temperatures and for different duration of time. The structure of these films was studied using X-ray diffraction. The coexistence of SrNb2O6 (SN) and SBN was observed in films crystallized at 700 °C. The amount of SN decreases when the crystallization time increases. Ferroelectric properties were determined for films crystallized at 700 °C for 1 and 5 h. For SBN film crystallized at 700 °C for 1 h, the remanent polarization (Pr) and the coercive field (Ec) were 2.6 muC/cm² and 71.9 kV/cm, respectively. For the film crystallized at 700 °C for 5 h these parameters were Pr = 1.1 muC/cm² and Ec = 50.5 kV/cm

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Section: Introductionmentioning

confidence: 99%

Structural characterization and ferroelectric properties of strontium barium niobate (Sr xBa1-xNb2O6) thin films

2001

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“…9 The general idea is to distribute the metallic ions homogeneously throughout the polymeric resin, prepared according to the Pechini method. 10 The process calls for forming a chelate between dissolved ions with a hydroxycarboxylic acid (citric acid).…”

Section: Methodsmentioning

confidence: 99%

“…Very recently, the preparation of SBN thin films by a chemical method based on a polymeric resin containing metallic ions was proposed. 9 The method was successfully applied to prepare SBN thin films of good quality and homogeneity.…”

Section: Introductionmentioning

confidence: 99%

Structural and electrical properties of strontium barium niobate thin films crystallized by conventional furnace and rapid-thermal annealing process

2001

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Strontium barium niobate (SBN) thin films were crystallized by conventional electric furnace annealing and by rapid-thermal annealing (RTA) at different temperatures. The average grain size of films was 70 nm and thickness around 500 nm. Using x-ray diffraction, we identified the presence of polycrystalline SBN phase for films annealed from 500 to 700°C in both cases. Phases such as SrNb 2 O 6 and BaNb 2 O 6 were predominantly crystallized in films annealed at 500°C, disappearing at higher temperatures. Dielectric and ferroelectric parameters obtained from films crystallized by conventional furnace and RTA presented essentially the same values.

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“…SBN thin films have been prepared by several techniques like sol-gel processing [9], pulsed laser deposition [10] and metalorganic chemical vapor deposition (MOCVD) [11]. Recently, it has been proposed to prepare SBN thin films by a chemical method based on a polymeric resin containing metallic ions [12]. However, the radio frequency (RF) magnetron sputtering is a simple method to deposit the needed thin films [13].…”

Section: Introductionmentioning

confidence: 99%

Preparation and properties of the (Sr,Ba)Nb₂O₆ thin films by using the sputtering method

Diao

Yang

2017

MATEC Web Conf.

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Abstract. Strontium barium niobate (Sr 0.3 Ba 0.7 Nb 2 O 6 , SBN) thin films were deposited on silicon substrate by using the radio frequency magnetron sputtering and under different deposition power and time at room temperature. Surface morphology and thicknesses of the SBN thin films were characterized by field emission scanning electron microscopy. The crystallization films at different deposition power and time were analyzed by X-ray diffraction (XRD) using CuKα radiation from a Rigaku rotating anode with an incident angle of 2°. The remnant polarization (Pr), saturation polarization (Ps), and minimum coercive field (Ec) properties of the metal-ferroelectric-metal (MFM) structure were measured using ferroelectric material test instrument. The SBN thin films deposited at 90 min and 125 W had the maximum Pr, Ps, and minimum Ec of 1.26 μC/cm 2 , 2.41 μC/cm 2 , and 201.6 kV/cm, respectively. From above results, it knows that the SBN thin films suit for application on ferroelectric random access memory (FeRAM).

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Untitled

Cited by 7 publications

References 11 publications

Structural characterization and ferroelectric properties of strontium barium niobate (Sr xBa1-xNb2O6) thin films

Structural characterization and ferroelectric properties of strontium barium niobate (Sr xBa1-xNb2O6) thin films

Structural and electrical properties of strontium barium niobate thin films crystallized by conventional furnace and rapid-thermal annealing process

Preparation and properties of the (Sr,Ba)Nb₂O₆ thin films by using the sputtering method

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Untitled

Cited by 7 publications

References 11 publications

Structural characterization and ferroelectric properties of strontium barium niobate (Sr xBa1-xNb2O6) thin films

Structural characterization and ferroelectric properties of strontium barium niobate (Sr xBa1-xNb2O6) thin films

Structural and electrical properties of strontium barium niobate thin films crystallized by conventional furnace and rapid-thermal annealing process

Preparation and properties of the (Sr,Ba)Nb2O6 thin films by using the sputtering method

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Preparation and properties of the (Sr,Ba)Nb₂O₆ thin films by using the sputtering method