2018
DOI: 10.1038/s41551-018-0300-4
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Bioresorbable pressure sensors protected with thermally grown silicon dioxide for the monitoring of chronic diseases and healing processes

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Cited by 200 publications
(162 citation statements)
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“…The limitations arise mainly from the inability of bioresorbable encapsulation layers, including polymers such as silk fibroin ( 22 ) and poly(lactic- co -glycolic acid) (PLGA) ( 20 ) and inorganic layers such as silicon dioxide ( 26 , 27 ) and various metal oxides ( 28 ) formed by chemical or physical vapor deposition, to prevent permeation of water into the active regions of the devices for extended periods. Recent work demonstrates that ultrathin layers of silicon dioxide thermally grown on device-grade silicon wafers (t-SiO 2 ) can be used as bioresorbable encapsulation layers, to enable stable operation of intracranial pressure (ICP) and temperature (ICT) sensors over a period of 25 days in rats ( 17 ).…”
Section: Introductionmentioning
confidence: 99%
“…The limitations arise mainly from the inability of bioresorbable encapsulation layers, including polymers such as silk fibroin ( 22 ) and poly(lactic- co -glycolic acid) (PLGA) ( 20 ) and inorganic layers such as silicon dioxide ( 26 , 27 ) and various metal oxides ( 28 ) formed by chemical or physical vapor deposition, to prevent permeation of water into the active regions of the devices for extended periods. Recent work demonstrates that ultrathin layers of silicon dioxide thermally grown on device-grade silicon wafers (t-SiO 2 ) can be used as bioresorbable encapsulation layers, to enable stable operation of intracranial pressure (ICP) and temperature (ICT) sensors over a period of 25 days in rats ( 17 ).…”
Section: Introductionmentioning
confidence: 99%
“… 14 , 49 , 60 Water penetration into the device is a common denominator for all of these breakdown mechanisms, for why separate water barrier layers have been studied to improve the stability of bioresorbable sensors. 61 , 62 There is a great demand for encapsulation layers that could be applied onto bioresorbable polymer substrates because the deposition of inorganic coatings often requires elevated temperatures. In this section, the pros and cons of low-temperature atomic layer deposited (ALD) TiO 2 films on polymeric substrates are discussed.…”
Section: Resultsmentioning
confidence: 99%
“…Inorganic coatings on rigid nondegradable wafers have been previously discussed in the literature. 61 , 62 , 70 …”
Section: Resultsmentioning
confidence: 99%
“…The normal stress distribution simulation results of the encapsulated sensor are shown in Figure 2 d. When subjected to a uniform load of 0.12 MPa, which is the top bound of a human normal blood pressure of 140 mmHg, 5 the stress quantity and distribution of the encapsulated sensor was almost the same as that of the unencapsulated pressure sensor; thus, the microlayer parylene coating was loaded very slightly (showing blue in Figure 2 d) and not appreciably influencing the sensitivity of the sensor. The stress concentration points in the square silicon component in the encapsulated pressure sensor chip still appear in the middle points of its four edges above the cavity of the silicon cup.…”
Section: Resultsmentioning
confidence: 99%