“…Notorious examples are microcylinders, [ 1,2 ] cubes, [ 3 ] and other polyhedrons, [ 4 ] which have already found applications, for instance, in electronics, [ 5–7 ] photonics, [ 8,9 ] and biology. [ 10–12 ] Self‐assembly by the roll‐up of structured thin‐film stacks into tubular “Swiss rolls” has been particularly successful in creating micromachined devices such as inductors, [ 13,14 ] capacitors, [ 15,16 ] microrobots, [ 17–19 ] and optical resonators [ 20–22 ] to only name a few. However, wet‐release techniques that are used in the fabrication of these microtubular architectures often suffer from serious stiction and damage problems due to the presence of capillary forces and aggressive reagents, resulting in limited yield, reproducibility, uniformity, and an overall deterioration of the device performance.…”