Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone

Rahaman, Ashiqur; Ishfaque, Asif; Jung, Haeil; Kim, Byungki

doi:10.1109/jsen.2018.2873781

Cited by 36 publications

(11 citation statements)

References 32 publications

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“…The piezoelectric mechanism in acoustic sensing was the other impressive topic because of the less power consumption. As shown in Figure 4c, a bio-inspired piezoelectric microphone was reported for sound detection [69]. The IDT structures were placed on the top of the aluminum nitride (AlN) film to utilize d 33 mode to identify the acoustic signal.…”

Section: Mems Acoustic Sensormentioning

confidence: 99%

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Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Section: Mems Acoustic Sensormentioning

confidence: 99%

“…(c) Bio-inspired piezoelectric microphone with a rectangular and a circular diaphragm. Adapted with permission from Rahaman et al[69]. (d) Hybrid-mode microphone with a piezoelectric and a capacitive mechanism.…”

mentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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“…Model (5) is the generalization of the following dimensionless model [30], where the thickness of the ground plate is zero so that the inertial effects can be neglected as well as the non-local effects (σ = 2, α = 1, = γ = χ = 0). Moreover, model (6) has been exploited in [5] in the following dimensionless form where λ 2 = λ 1 f 1 (x):…”

Section: D Electrostatic Membrane Mems: a Brief Scientific Literaturmentioning

confidence: 99%

“…MEMS technology has since been further developed, starting from engineering fields up to multi-physics-mathematical disciplines due to advanced theoretical models that allow the explicit obtaining of solutions [3,4]. Alternatively, if such solutions were not explicitly obtainable, it is desirable to obtain conditions that guarantee the existence, uniqueness, and regularity of the solutions [5,6]. Furthermore, if the explicit solution is not obtainable, it is possible to obtain solutions by means of numerical techniques, where, if they satisfy the analytical conditions of existence, uniqueness, and regularity, the absence of ghost solutions is ensured [7][8][9][10].…”

Section: Introduction To the Problemmentioning

confidence: 99%

Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control

Barba

Fattorusso

Versaci

2020

Communications in Applied and Industrial Mathematics

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The recovery of the membrane profile of an electrostatic micro-electro-mechanical system (MEMS) device is an important issue because, when applying an external voltage, the membrane deforms with the consequent risk of touching the upper plate of the device (a condition that should be avoided). Then, during the deformation of the membrane, it is useful to know if this movement admits stable equilibrium configurations. In such a context, our present work analyze the behavior of an electrostatic 1D membrane MEMS device when an external electric voltage is applied. In particular, starting from a well-known second-order elliptical semi-linear di erential model, obtained considering the electrostatic field inside the device proportional to the curvature of the membrane, the only possible equilibrium position is obtained, and its stability is analyzed. Moreover, considering that the membrane has an inertia in moving and taking into account that it must not touch the upper plate of the device, the range of possible values of the applied external voltage is obtained, which accounted for these two particular operating conditions. Finally, some calculations about the variation of potential energy have identified optimal control conditions.

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“…Studies in [27,28] explained that the reason about the Ormia ochracea creating this advantage was that the Ormia ochracea's left and right acoustical-sensory organs were not physically separated, but connected by a mechanical coupling, which increased the two-ear time delay and amplitude difference. Recently, the mechanical system of the Ormia ochracea's two ears has drawn sufficient attention and has been widely applied in the manufacture of microphones [29][30][31], the design of two-element antenna arrays [32,33], the DOA estimation based on a microphone array or an antenna array [34,35], etc. To our knowledge, this mechanical system of the Ormia ochracea's two ears has not been studied for applications of AVSAs.…”

Section: Introductionmentioning

confidence: 99%

Frequency Invariant Beamforming for a Small-Sized Bi-Cone Acoustic Vector–Sensor Array

Fang

Gui

Yang

et al. 2020

Sensors

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In this work, we design a small-sized bi-cone acoustic vector-sensor array (BCAVSA) and propose a frequency invariant beamforming method for the BCAVSA, inspired by the Ormia ochracea’s coupling ears and harmonic nesting. First, we design a BCAVSA using several sets of cylindrical acoustic vector-sensor arrays (AVSAs), which are used as a guide to construct the constant beamwidth beamformer. Due to the mechanical coupling system of the Ormia ochracea’s two ears, the phase and amplitude differences of acoustic signals at the bilateral tympanal membranes are magnified. To obtain a virtual BCAVSA with larger interelement distances, we then extend the coupling magnified system into the BCAVSA by deriving the expression of the coupling magnified matrix for the BCAVSA and providing the selecting method of coupled parameters for fitting the underwater signal frequency. Finally, the frequency invariant beamforming method is developed to acquire the constant beamwidth pattern in the three-dimensional plane by deriving several sets of the frequency weighted coefficients for the different cylindrical AVSAs. Simulation results show that this method achieves a narrower mainlobe width compared to the original BCAVSA. This method has lower sidelobes and a narrower mainlobe width compared to the coupling magnified bi-cone pressure sensor array.

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Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone

Cited by 36 publications

References 32 publications

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control

Frequency Invariant Beamforming for a Small-Sized Bi-Cone Acoustic Vector–Sensor Array

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