Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure

Ma, Wei; Zhao, Rui; Wang, Shuyang; Yu, Xiaomei; Feng, Yun; Zhao, Yiyang

doi:10.1109/jmems.2016.2533427

Cited by 6 publications

(5 citation statements)

References 18 publications

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“…where f ∆ is the measurement bandwidth, which is typically about 30 Hz for a CCD detector; Q the resonance quality factor, which is the ratio of the vibration amplitude at resonant frequency to that at off-resonant frequency; and Q is typically about 10 at atmospheric pressure, and 100-1000 in vacuum (Q 500 = for our calculation). g and 0 w are the cantilever's spring constant and the system resonant frequency respectively, which can be obtained by simulating [14]. Using the thermomechanical sensitivity of the cantilever, thermomechanical noise can be converted to an equivalent temperature fluctuation as:…”

Section: Vibration Noisementioning

confidence: 99%

“…Compared with photon IR detectors, uncooled IR detectors are more widely used in the non-military field for their ability to work at ambient temperature, which brings lower cost and power consumption. Furthermore, among various types of uncooled detectors, the optomechanical detectors based on the thermal response of bi-material micro-cantilever have been researched a lot [11,12] and shown significant potentials [13][14][15][16] for their simple fabricating, cost-reducing, and more importantly, readout integrated circuits(ROIC) removing [10]. So that the parasitic heat from ROIC is eliminated and there is no thermal leakage path caused by the electrical contacts between pixels and substrate.…”

Section: Introductionmentioning

confidence: 99%

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Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens

Luo,

Hou,

Zhang

et al. 2023

Phys. Scr.

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Optomechanical uncooled infrared (IR) detectors based on the thermal deformation of bi-material micro-cantilever have proved of significant potential in the IR imaging fields. However, compared to other uncooled infrared detectors, the optomechanical type relies on the mechanical deformation of the thermomechanical cantilevers, which compete for space with the absorbers and isolation beams, resulting in limited sensitivity. By integrating a designed metalens, large deformation, high thermal isolation, and high effective fill factor can be achieved simultaneously. Several pixel designs of optomechanical uncooled IR focal plane array (FPA) with designed integrated metalens are evaluated and optimized through numerical simulation. High thermal conversion efficiency H = 0.016 and thermomechanical sensitivity S T = 0.264 μm K−1 are simultaneously achieved with an inherent noise-equivalent temperature difference(NETD) value of 3.9 mK at the preset 60 μ m × 60 μ m pixels. Using Figure of Merit(FOM) as a comprehensive evaluation of NETD and response time, the optimized structure can be improved by up to 40% over the original structure.

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Section: Vibration Noisementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens

Luo,

Hou,

Zhang

et al. 2023

Phys. Scr.

View full text Add to dashboard Cite

show abstract

“…Moreover, in line with standardization studies, Carranza et al showed standard 180 nm complementary metal-oxide-semiconductor (CMOS) compatible metamaterial coupled with VOx and Si pn diode for security imaging devices 20 . In all these previous studies, despite the system complexity, the sensing pixels generally use single and narrowband metamaterial response which limits the sensing capacity 15,18,[21][22][23] .…”

Section: Fractal Interwoven Resonator Based Penta-band Metamaterials ...mentioning

confidence: 99%

“…The proposed fractal metamaterial absorber can be used as a sensing platform for real time optomechanical uncooled imaging 21,23,25,26 . We present an FMMA based sensing pixel design for bimaterial microcantilever focal plane array (FPA) imaging systems.…”

Section: Designmentioning

confidence: 99%

Fractal interwoven resonator based penta-band metamaterial absorbers for THz sensing and imaging

Özpinar

Aksimsek

2022

Sci Rep

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This paper presents a unique penta-band metamaterial absorber platform for terahertz imaging systems.The proposed fractal metamaterial absorber (FMMA) consists of fractal triangle section metasurfaces. By combining fractal resonators posing different operation skills in the same unit cell, the absorber shows multiband spectral response. The proposed unit cell structure operates at five near perfect absorption modes corresponding to the frequency bands of 1.1 THz, 3.4 THz, 4.9 THz, 5.9 THz, and 7.8 THz, respectively. Based on the fractal metamaterial absorber array, we also propose a sensing pixel design for bimaterial cantilever array sensing systems. The single pixel assembles 4x6 fractal resonator array and $$SiO_2$$ S i O 2 -Al bimaterial microcantilevers. The sensing region of the FMMA pixel can bend the bimaterial cantilevers effectively at multiple modes, enhancing the imaging capacity. The effective medium theory is executed to visualize the constitute parameters during the absorption and reveal the origin of the rising modes. The absorption mechanism is also discussed based on the surface current distributions and electric field profiles. The numerical outcomes prove that the proposed fractal metamaterial unit cell is a promising candidate as an absorbing platform for THz band sensing and imaging applications. The derived iterative formula used in the fractal design procedure is explained for further investigations of microelectromechanical systems (MEMS) compatible compact absorber arrays.

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“…Infrared (IR) imaging is used extensively for military and civilian purposes. Terahertz (THz) imaging has also received a lot of attention recently because of its attractive features such as being harmless and capable of penetrating through fabric [1][2][3][4][5][6][7][8]. Compared to microbolometers, microcantilever focal plane arrays (MFPAs) offer a more sensitive and cheaper solution to far IR [9][10][11][12][13][14][15] and THz [1,16] imaging.…”

Section: Introductionmentioning

confidence: 99%

Optical spatial filtering readout techniques for IR/THz imaging and their performance analysis

Jin¹,

Shi²,

Zhang³

2021

Meas. Sci. Technol.

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Optical spatial filtering readout techniques (OSFRTs), such as knife-edge filtering and circular hole filtering, are broadly used in optomechanical microcantilever focal plane arrays for infrared (IR)/terahertz (THz) imaging. In order to further improve the responsivity of IR/THz imaging, it is important to improve the optical readout responsivity (ORR). However, the shape and location of the optical spatial filter cannot be well optimized for lack of a unified theoretical ORR model of OSFRTs. This paper gives and experimentally validates a unified ORR model of OSFRTs. Based on this model, the influence of the shape and location of the four commonly used spatial filters on the imaging resolution and light utilization efficiency is discussed. Both theory and experiment show that the slit filter has higher optical readout responsivity than the knife-edge filter and better light utilization efficiency than the rectangular or circular hole filters. Therefore, the slit filter should be the best of the four commonly used filters.

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Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure

Cited by 6 publications

References 18 publications

Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens

Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens

Fractal interwoven resonator based penta-band metamaterial absorbers for THz sensing and imaging

Optical spatial filtering readout techniques for IR/THz imaging and their performance analysis

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