2016 IEEE Workshop on Microelectronics and Electron Devices (WMED) 2016
DOI: 10.1109/wmed.2016.7458273
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Big Data and Predictive Analytics Methods for Modeling and Analysis of Semiconductor Manufacturing Processes

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Cited by 9 publications
(4 citation statements)
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“…The classification also provides a useful perspective for better understanding and also evaluating many learning algorithms. For hypothesis, this will helps to determine exact probabilities and also it is robust to noise in input data [11].…”
Section: Naïve Bayesmentioning
confidence: 99%
“…The classification also provides a useful perspective for better understanding and also evaluating many learning algorithms. For hypothesis, this will helps to determine exact probabilities and also it is robust to noise in input data [11].…”
Section: Naïve Bayesmentioning
confidence: 99%
“…The widely used approaches from the reviewed articles include regression [34,44,45,83,86,89,110,126,127], analysis of variance (ANOVA) [27,79], GA [55,83], Las Vegas filter [60,78], Pearson coefficient [79], Cramer's V correlation coefficients [85,87], and so on. Clustering [38,90,101,126], aggregation [34,87], and sampling [82] based approaches were applied to reduce the data numerosity. PCA or the modified PCA [64,65,83,92,94], and multi-dimensional scaling [84] were employed to compress the representation of the original data.…”
Section: Data Handlingmentioning
confidence: 99%
“…One of the research papers deals with predicting the performance (yield) of a manufacturing process or system in terms of critical functional characteristics. Months may pass before a chip is completed; hence, there is a great interest in mining production data to predict its performance prior to the final testing of the wafers [100][101][102][103][104][105][106][107][108]. In order to infer to the possible causes of faults and manufacturing process variations in semiconductor manufacturing after the whole fab process is completed, the clustering, classification, and association analyses are conducted based on different DMTs such as k-means, SOM, SVM, and decision tree to identify critical poor yield factors and determine the root cause of low yield.…”
Section: Application Of Dm and Big Data For Productionmentioning
confidence: 99%
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